DD1: refresh COMPLIANCE.md for full GEM 300 + 291 tests
The doc was last updated when only E40 + E94 were in tree. Brings it
up to date with everything actually implemented:
* New §4a–§4k tables for each GEM 300 standard: E40, E94, E87, E90,
E116, E120, E148, E157, E84, E5 §13 wafer maps, and the exception
recovery extension (S5F13–F18 + ExceptionStateMachine).
* Refreshed message coverage matrix to all 149 catalog entries
(added S1F23/F24, S2F21/F22, S6F5–F8/F15–F22, S7F1/F2/F17/F18,
S10F3/F4, S12F9–F18).
* Updated test count to 291 cases / 1515 assertions.
* New §7 documents the secsgem-py interop harness (24 host-side
checks + raw-GEM300 round-trip).
* §8 trimmed: persistent spool is no longer "out of scope" (CC1
landed); E40/E87/E90 removed from "Layer 5 follow-on" list since
they're done.
* §9 honesty pass — every GEM 300 standard in scope now implemented
end-to-end; the remaining gap is third-party RTS certification +
per-vendor application wiring.
Co-Authored-By: Claude Opus 4.7 <noreply@anthropic.com>
This commit is contained in:
+246
-148
@@ -1,13 +1,19 @@
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# SECS/GEM Compliance
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A per-capability accounting against SEMI **E5 (SECS-II)**, **E30 (GEM)**,
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**E37 (HSMS)**, and **GEM300 E40 / E94** (process / control jobs).
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A per-capability accounting against the foundational SEMI standards
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**E5 (SECS-II)**, **E30 (GEM)**, **E37 (HSMS)**, **E4 (SECS-I)**, plus
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the full GEM 300 stack: **E40** (process jobs), **E94** (control jobs),
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**E87** (carriers), **E90** (substrates), **E116** (equipment
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performance tracking), **E120** (common equipment model), **E157**
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(module process tracking), **E84** (parallel I/O), **E148** (time
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synchronization), **E39** (object services), plus **E5 §13** wafer maps.
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> **Status.** Every GEM Fundamental capability and every GEM Additional
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> capability that E30 ties to a concrete SECS-II message set is
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> implemented. See §7 for the explicit out-of-scope items (which are
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> deliberate, not omissions) and §8 for what "100% GEM-compliant" can
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> and cannot honestly mean about this codebase.
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> **Status.** Every GEM Fundamental and every GEM Additional capability
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> that E30 binds to a concrete SECS-II message set is implemented, and
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> every GEM 300 standard the project sets out to cover is implemented
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> end-to-end (state machines + stores + wire messages + dispatch). See
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> §8 for the items deliberately out of scope and §9 for what
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> "100% GEM-compliant" can and cannot honestly mean about a codebase.
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Legend:
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@@ -68,12 +74,14 @@ Legend:
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| ASCII (`A`) | ✅ | E5 §9.5 | |
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| Binary (`B`) | ✅ | E5 §9.5 | |
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| Boolean (`BOOLEAN`) | ✅ | E5 §9.5 | |
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| `U1, U2, U4, U8` (big-endian) | ✅ | E5 §9.5 | |
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| `I1, I2, I4, I8` (big-endian, two's complement) | ✅ | E5 §9.5 | |
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| `U1, U2, U4, U8` (big-endian) | ✅ | E5 §9.5 | Identifier parsers accept any width per the SEMI wildcard rule. |
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| `I1, I2, I4, I8` (big-endian, two's complement) | ✅ | E5 §9.5 | Same lenient-width policy. |
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| `F4, F8` (IEEE 754 big-endian) | ✅ | E5 §9.5 | bit-cast round-trip. |
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| JIS-8 (single-byte JIS text) | ✅ | E5 §9.5 | `Format::JIS8` (0x11); shares `std::string` storage with ASCII, disambiguated by `Format`. |
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| C2 (Unicode 2-byte code points) | ✅ | E5 §9.5 | `Format::C2` (0x12); big-endian uint16_t code points. |
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| SML text rendering | ✅ | E5 Annex | `secs2::to_sml`. JIS-8 prints as `<J "...">`, C2 as `<C 65 66 ...>`. |
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| SML parser (inverse of `to_sml`) | ✅ | — | `secs2::from_sml`; round-trips every format. |
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| `ASCII | Binary` wildcard fields | ✅ | E5 | `BINARY_OR_ASCII` schema type for PPBODY etc.; accepted by `as_text_or_binary`. |
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---
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@@ -82,12 +90,12 @@ Legend:
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| Fundamental Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| State models | ✅ | E30 §6.2 | — | E30 control state machine (5 states) + HSMS communication state machine. |
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| Equipment Processing States | ✅ | E30 §6.3 | — | The `ControlTransitionTable` engine is general; vendors load their tool-specific states (IDLE/SETUP/READY/EXECUTING/PAUSE/...) via a second YAML file using the same loader. The spec leaves the concrete states tool-specific. |
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| Equipment Processing States | ✅ | E30 §6.3 | — | `ControlTransitionTable` engine; vendors load their tool-specific states (IDLE/SETUP/READY/EXECUTING/PAUSE/…) via a second YAML file using the same loader. The spec leaves the concrete states tool-specific. |
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| Host-Initiated S1F13/F14 scenario | ✅ | E30 §6.5 | S1F13/F14 | |
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| Event Notification | ✅ | E30 §6.6 | S6F11/F12 | Equipment-initiated, host-acknowledged. |
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| On-Line Identification | ✅ | E30 §6.7 | S1F1/F2 | MDLN + SOFTREV. |
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| Error Messages | ✅ | E30 §6.9 | S9F* | Auto-emission of S9F3/F5/F7/F9/F11 on the documented protocol-error conditions; S9F1/F13 in the catalog for explicit emission. |
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| Documentation | ✅ | E30 §6.10| S1F19/F20, S1F21/F22 | Equipment self-reports its compliance + DVID namelist. |
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| Documentation | ✅ | E30 §6.10| S1F19/F20, S1F21/F22, S1F23/F24 | Equipment self-reports compliance, DVID namelist, AND collection-event namelist (CEID → VIDs). |
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| Control (Operator-Initiated) | ✅ | E30 §6.2 | — | `ControlStateMachine::operator_online/offline/local/remote`. |
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---
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@@ -97,133 +105,201 @@ Legend:
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| Additional Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Establish Communications | ✅ | E30 §6.5 | S1F13/F14 | Both directions modeled; COMMACK enum. Backed by the E30 §6.5 Communication state machine (`gem::CommunicationStateMachine`) with DISABLED / WAIT-CRA / WAIT-DELAY / COMMUNICATING substates and the T_CRA + T_DELAY retry timers, separate from HSMS connection state. |
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| Dynamic Event Report Configuration | ✅ | E30 §6.6 | S2F33/F34, S2F35/F36, S2F37/F38 | Full Define-Report / Link-Event / Enable-Event pipeline with all four ack enums. |
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| Dynamic Event Report Configuration | ✅ | E30 §6.6 | S2F33/F34, S2F35/F36, S2F37/F38 | Full Define-Report / Link-Event / Enable-Event pipeline with all four ack enums. Host-initiated readback via S6F15/F16, S6F19/F20, S6F21/F22. |
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| Variable Data Collection | ✅ | E30 §6.11| S1F21/F22 | DVID namelist + DVID values resolvable via `EquipmentDataModel::vid_value`. |
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| Trace Data Collection | ✅ | E30 §6.12| S2F23/F24, S6F1/F2 | `TraceStore` keeps active TRID→TraceConfig; periodic sampling left to the application's scheduler. |
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| Status Data Collection | ✅ | E30 §6.13| S1F3/F4, S1F11/F12 | |
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| Alarm Management | ✅ | E30 §6.14| S5F1/F2, S5F3/F4, S5F5/F6, S5F7/F8 | Full set. ALCD bit-7 set/cleared, lower-7 category. |
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| Remote Control | ✅ | E30 §6.15| S2F41/F42 | Full HCACK 7-value enum + per-parameter CPACKs. |
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| Remote Control | ✅ | E30 §6.15| S2F41/F42, S2F49/F50, S2F21/F22 | Modern (CPACK), enhanced (OBJSPEC + CEPACK), and legacy (no params) forms all dispatched against the same `HostCommandRegistry`. |
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| Equipment Constants | ✅ | E30 §6.16| S2F13/F14, S2F15/F16, S2F29/F30 | EAC range validation against `min_str`/`max_str` for numeric ECs. |
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| Process Program Management | ✅ | E30 §6.17| S7F3/F4, S7F5/F6, S7F19/F20 | Unformatted PP send/request/list — the minimum E30 GEM requires. (E42 *enhanced* PP is a separate SEMI standard; see §7.) |
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| Material Movement | 🟡 | E30 §6.18| — | Process Job + Control Job lifecycle covered via E40/E94 (see §4a). Carrier (E87) and substrate (E90) still out of scope. |
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| Process Program Management | ✅ | E30 §6.17| S7F1/F2, S7F3/F4, S7F5/F6, S7F17/F18, S7F19/F20 | Unformatted PP load-inquire/send/request/delete/list. Covers the full GEM PP set (E42 *enhanced* PP is a separate standard; see §8). |
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| Material Movement | ✅ | E30 §6.18| (see §4a-4h)| Now fully covered: process jobs (E40), control jobs (E94), carriers (E87), substrates (E90), modules (E157). |
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| Equipment Terminal Services | ✅ | E30 §6.19| S10F1/F2, S10F3/F4, S10F5/F6 | Single-line both directions + multi-line host→equipment. S10F7 broadcast intentionally omitted (rarely used). |
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| Clock | ✅ | E30 §6.20| S2F17/F18, S2F31/F32 | 16-char (`YYYYMMDDhhmmsscc`) and 14-char accepted on set. |
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| Clock | ✅ | E30 §6.20| S2F17/F18, S2F31/F32 | 16-char (`YYYYMMDDhhmmsscc`) and 14-char accepted on set. Drift tracking + quality via E148 (§4g). |
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| Limits Monitoring | ✅ | E30 §6.21| S2F45/F46, S2F47/F48 | `LimitMonitorStore` keyed by VID with multiple `LimitDefinition` (LIMITID + upper/lower as arbitrary Items). |
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| Spooling | ✅ | E30 §6.22| S2F43/F44, S6F23/F24, S6F25/F26 | Per-stream whitelist, FIFO queue, host-driven transmit/purge, S6F25 auto-emitted on re-SELECT when non-empty. |
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| Spooling | ✅ | E30 §6.22| S2F43/F44, S6F23/F24, S6F25/F26 | Per-stream whitelist, FIFO queue, host-driven transmit/purge, S6F25 auto-emitted on re-SELECT when non-empty. **Persistent**: opt-in file-backed journal (`SpoolStore::enable_persistence(dir)`) survives equipment restarts. |
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| Control | ✅ | E30 §6.2 | — | See Fundamental. |
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---
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## 4a. E40 Process Jobs + E94 Control Jobs (GEM300)
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The first GEM300 extension landing on the spec-as-data architecture.
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Both standards are implemented the same way the E30 control state model
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is: state set + legal transitions in YAML
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(`data/process_job_state.yaml`, `data/control_job_state.yaml`), engine
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in C++ (`gem::ProcessJobStateMachine`, `gem::ControlJobStateMachine`),
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runtime collections (`ProcessJobStore`, `ControlJobStore`) wired into
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the existing `EquipmentDataModel`.
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## 4a. E40 Process Jobs
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| E40 PJ state model | ✅ | E40 §6.3 | — | 8 states (Queued, SettingUp, WaitingForStart, Processing, ProcessComplete, Paused, Stopping, Aborting); state byte matches PRJOBSTATE on the wire. |
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| E40 PRJobCreate | ✅ | E40 §10.2| S16F11/F12 | Body simplified to <L,3 PRJOBID PPID L,n MTRLOUTSPEC>; MF/PRRECIPEMETHOD/PRPROCESSPARAMS are documented as YAML-extension points. PPID validated against `RecipeStore`. |
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| E40 PRJobDequeue | ✅ | E40 §10.2| S16F13/F14 | Only legal while PJ is QUEUED; the FSM blocks dequeue otherwise. |
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| E40 PRJobCommand | ✅ | E40 §10.2| S16F5/F6 | PRCMD strings PJSTART/PJPAUSE/PJRESUME/PJSTOP/PJABORT/PJHOQ; the matching `ProcessJobEvent` is dispatched against the FSM, HCACK is `CannotDoNow` when the (state, command) pair has no row. |
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| E40 PRJobAlert | ✅ | E40 §10.3| S16F9 | Equipment-initiated one-way (W=0). Fires automatically on every PJ state transition; per-PJ `alert_enabled` flag controls suppression. |
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| E94 CJ state model | ✅ | E94 §6 | — | 9 states (Queued, Selected, WaitingForStart, Executing, Paused, Completed, Stopping, Aborting, NoState). CJ owns an ordered `prjobids` list. |
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| E94 CreateObject (CJ) | ✅ | E94 §6.4 | S14F9/F10 | Body simplified to <L,2 CTLJOBID L,n PRJOBIDs>; full generic E14 ObjectService form is a YAML extension. OBJACK enum covers Success/Error + the four `Denied_*` cases. |
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| E94 DeleteObject (CJ) | ✅ | E94 §6.4 | S14F11/F12 | |
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| E94 CJobCommand | ✅ | E94 §6.4 | S16F27/F28 | CTLJOBCMD: CJSTART (cascades through Select → SetupComplete → Start as application policy), CJPAUSE / CJRESUME / CJSTOP / CJABORT. |
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| E40+E94 CEID emission | ✅ | — | S6F11 | ControlJobExecuting (CEID 400) and ControlJobCompleted (CEID 401) fire on CJ state transitions via the existing event-report pipeline; PJ state changes use S16F9 (per spec). |
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| PJ state model | ✅ | E40 §6.3 | — | 8 states (Queued, SettingUp, WaitingForStart, Processing, ProcessComplete, Paused, Stopping, Aborting); state byte matches PRJOBSTATE on the wire. |
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| PRJobCreate (full body) | ✅ | E40 §10.2| S16F11/F12 | Full E40-0705 body: `<L,5 PRJOBID MF PRRECIPEMETHOD <L,2 PPID <L RCPVARLIST>> <L MTRLOUTSPEC> <L PRPROCESSPARAMS>>`. PPID validated against `RecipeStore`. |
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| PRJobCreateMultiple | ✅ | E40 §10 | S16F15/F16 | Bulk variant; per-job ACK list. |
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| PRJobDequeue | ✅ | E40 §10.2| S16F13/F14 | Only legal while PJ is QUEUED. |
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| PRJobMonitor | ✅ | E40 §10 | S16F7/F8 | Per-PJ alert enable/disable. |
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| PRJobCommand | ✅ | E40 §10.2| S16F5/F6 | PRCMD strings PJSTART/PJPAUSE/PJRESUME/PJSTOP/PJABORT/PJHOQ. |
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| PRJobAlert | ✅ | E40 §10.3| S16F9 | Equipment-initiated one-way (W=0). Fires automatically on every PJ state transition. |
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The demo's `run_cj_lifecycle` cascade — on CJSTART the CJ steps Queued
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→ Selected → WaitingForStart → Executing and every contained PJ steps
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through SettingUp → WaitingForStart → Processing → ProcessComplete —
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is **application policy**, not the FSM. The FSM rules in the YAML
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tables gate every individual transition; the cascade is just the
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simulator playing every legal next step in sequence so the wire trace
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exercises the whole lifecycle.
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## 4b. E94 Control Jobs
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What's **out of scope for the E40/E94 first pass** (deliberate; all are
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YAML/handler extensions, not surgery):
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- Full E40 S16F11 body (MF / PRRECIPEMETHOD / RCPSPEC / PRPROCESSPARAMS).
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We carry PRJOBID + PPID + MTRLOUTSPEC, which is the subset that
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drives the state machine; richer body fields are a YAML edit + a
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parameter map on the `ProcessJob` struct.
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- S16F15/F16 PRJobCreateMultiple, S16F17/F18 PRJobMultipleDequeue.
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- E14 generic ObjectService form. We use a CJ-specialized S14F9 shape;
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generic ObjectService is a separate set of YAML rows.
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- E87 Carrier Management and E90 Substrate Tracking — Layer 5
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continues there per `implementation_plan.md`.
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| CJ state model | ✅ | E94 §6 | — | 9 states; CJ owns an ordered `prjobids` list. |
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| CreateObject (CJ) | ✅ | E94 §6.4 | S14F9/F10 | Body `<L,2 CTLJOBID L,n PRJOBIDs>`. |
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| DeleteObject (CJ) | ✅ | E94 §6.4 | S14F11/F12 | |
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| CJobCommand | ✅ | E94 §6.4 | S16F27/F28 | CTLJOBCMD: CJSTART, CJPAUSE, CJRESUME, CJSTOP, CJABORT. |
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| CJ CEID emission | ✅ | — | S6F11 | ControlJobExecuting (CEID 400) and ControlJobCompleted (CEID 401) fire on CJ state transitions via the existing event-report pipeline. |
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## 4c. E87 Carrier Management
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Carrier state model | ✅ | E87 §6 | — | CarrierStateMachine + LoadPortStateMachine; CIDS, CSMS, CASS, LPRS, LPTS axes. |
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| CarrierAction | ✅ | E87 §10.2| S3F17/F18 | ProceedWithCarrier, CancelCarrier, BindCarrierID. |
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| Slot Map Verify | ✅ | E87 §10 | S3F19/F20 | Equipment compares against stored slots; drives CSMS NotRead → Read/Mismatched. |
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| Slot Map Report | ✅ | E87 §10 | S3F21/F22 | Equipment notifies host of read slot map; host acks. |
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| Port Group Change | ✅ | E87 §10.4| S3F23/F24 | Host modifies load-port grouping; PortGroupAck. |
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| Carrier Transfer | ✅ | E87 §10 | S3F25/F26 | Move carrier between ports; fires Start{Un}Loading transfer events. |
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| Cancel Carrier | ✅ | E87 §10 | S3F27/F28 | Drives CancelCarrier ID event + Cancel access event. |
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## 4d. E90 Substrate Tracking
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Substrate state model | ✅ | E90 §6 | — | Three axes: location (AtSource/AtWork/AtDestination), processing (NeedsProcessing/InProcess/Processed/Aborted/Stopped/Rejected/Lost/Skipped), id-status (Confirmed/Unconfirmed/Lost). |
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| SubstrateHistory | ✅ | — | — | Per-substrate append-only ring buffer of state transitions. |
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| Standard CEIDs | ✅ | E90 §7 | S6F11 | All E90 CEIDs emitted on transition; observable host-side. |
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## 4e. E116 Equipment Performance Tracking
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| EPT state machine | ✅ | E116 §6 | — | NonScheduledTime / ScheduledDowntime / UnscheduledDowntime / Engineering / Standby / Productive. |
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| Time-bucket accounting | ✅ | E116 | — | Cumulative ms per state; resettable. |
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| EPT CEIDs | ✅ | E116 | S6F11 | One CEID per state. |
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## 4f. E120 Common Equipment Model
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Generic ObjectService (E39) | ✅ | E39 §5 | S14F1/F2, S14F3/F4 | GetAttr / SetAttr against `CemObjectStore`; OBJTYPE validation. |
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| CemObjectStore | ✅ | E120 | — | Typed objects keyed by OBJSPEC + ObjType. |
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## 4g. E148 Time Synchronization
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Time-sync drift tracking | ✅ | E148 | S2F31/F32 | Drift metric maintained on every set; quality score for hosts. |
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## 4h. E157 Module Process Tracking
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Module state machine | ✅ | E157 §6 | — | NotExecuting / GeneralExecuting / StepExecuting / StepCompleted. |
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| Module CEIDs | ✅ | E157 | S6F11 | Generic ModuleProcessStateChange + per-state CEIDs. |
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## 4i. E84 Parallel I/O Handoff
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Handoff state machine | ✅ | E84 | — | Full LOAD / UNLOAD signal vocabulary (CS_0/CS_1, VALID, TR_REQ, BUSY, COMPT, AM_AVBL, ES). |
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## 4j. E5 §13 Wafer Maps (S12)
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
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| Map Setup Data | ✅ | E5 §13 | S12F1/F2, S12F3/F4 | |
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| Map Transmit Inquire / Grant | ✅ | E5 §13 | S12F5/F6 | |
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| Map Data Send — row format (MAPFT=0) | ✅ | E5 §13 | S12F7/F8 | |
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| Map Data Send — array format (MAPFT=1)| ✅ | E5 §13 | S12F9/F10 | STRP + BINLT. |
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| Map Data Send — coord format (MAPFT=2)| ✅ | E5 §13 | S12F11/F12 | XYPOS + per-die BIN. |
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| Map Data Request — row | ✅ | E5 §13 | S12F13/F14 | |
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| Map Data Request — array | ✅ | E5 §13 | S12F15/F16 | |
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| Map Data Request — coord | ✅ | E5 §13 | S12F17/F18 | |
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| Map Error Send | ✅ | E5 §13 | S12F19 | One-way error report. |
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## 4k. Exception Recovery (beyond E5 base alarms)
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| Capability | Status | Spec ref | Messages | Notes |
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|---------------------------------------|--------|----------|----------|-------|
|
||||
| ExceptionStateMachine FSM | ✅ | — | — | Per-EXID Posted / Recovering / RecoverFailed / Cleared lifecycle. Not in upstream secsgem-py. |
|
||||
| Exception post / clear | ✅ | E5 §13 | S5F9/F10, S5F11/F12 | |
|
||||
| Exception recover request / complete | ✅ | E5 §13 | S5F13/F14, S5F15/F16 | EXRECVRA validated against the posted candidates. |
|
||||
| Exception recover abort | ✅ | E5 §13 | S5F17/F18 | |
|
||||
| AlarmSeverity bit-flag enum | ✅ | — | — | Classification helpers for the ALCD lower 7 bits. |
|
||||
|
||||
---
|
||||
|
||||
## 5. Message coverage matrix
|
||||
|
||||
| Pair | Direction | Status | Implemented in | Tested |
|
||||
|------------------|-----------|--------|----------------|--------|
|
||||
| S1F1 / S1F2 | H↔E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F3 / S1F4 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F11 / S1F12 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F13 / S1F14 | H↔E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F15 / S1F16 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F17 / S1F18 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F19 / S1F20 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S1F21 / S1F22 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F13 / S2F14 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F15 / S2F16 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S2F17 / S2F18 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F23 / S2F24 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S2F25 / S2F26 | H→E | ✅ | catalog | ✅ round-trip (loopback diagnostic) |
|
||||
| S2F29 / S2F30 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F31 / S2F32 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F33 / S2F34 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F35 / S2F36 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F37 / S2F38 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F41 / S2F42 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F43 / S2F44 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S2F45 / S2F46 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S2F47 / S2F48 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S5F1 / S5F2 | E→H | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S5F3 / S5F4 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S5F5 / S5F6 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S5F7 / S5F8 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S5F9 / S5F10 | E→H | ✅ | catalog | ✅ round-trip (exception post) |
|
||||
| S5F11 / S5F12 | E→H | ✅ | catalog | ✅ round-trip (exception clear) |
|
||||
| S5F13 / S5F14 | H→E | ✅ | catalog | ✅ round-trip (exception recover request) |
|
||||
| S5F15 / S5F16 | E→H | ✅ | catalog | ✅ round-trip (exception recover complete) |
|
||||
| S5F17 / S5F18 | H→E | ✅ | catalog | ✅ round-trip (exception recover abort) |
|
||||
| S2F49 / S2F50 | H→E | ✅ | catalog + server | ✅ round-trip + dispatch (enhanced remote command, OBJSPEC + per-CP CPACK/CEPACK) |
|
||||
| S12F1 / S12F2 | H→E | ✅ | catalog | ✅ round-trip (Map Setup Data Send, E5 §13) |
|
||||
| S12F3 / S12F4 | H→E | ✅ | catalog | ✅ round-trip (Map Setup Data Request) |
|
||||
| S12F5 / S12F6 | E→H | ✅ | catalog | ✅ round-trip (Map Transmit Inquire / Grant) |
|
||||
| S12F7 / S12F8 | E→H | ✅ | catalog | ✅ round-trip (Map Data Send, row format MAPFT=0) |
|
||||
| S12F19 | E→H | ✅ | catalog | ✅ round-trip (Map Error Send, one-way) |
|
||||
| S6F1 / S6F2 | E→H | ✅ | catalog | ✅ round-trip |
|
||||
| S6F11 / S6F12 | E→H | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S6F23 / S6F24 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S6F25 / S6F26 | E→H | ✅ | catalog + server | ✅ round-trip + auto-emitted on re-SELECT |
|
||||
| S7F3 / S7F4 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S7F5 / S7F6 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S7F19 / S7F20 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S9F1 | E↔H | ✅ | catalog | ✅ round-trip |
|
||||
| S9F3 | E↔H | ✅ | catalog + Router wrapper | ✅ round-trip + auto-emitted on unknown stream |
|
||||
| S9F5 | E↔H | ✅ | catalog + Router wrapper | ✅ round-trip + auto-emitted on unknown function |
|
||||
| S9F7 | E↔H | ✅ | catalog + Connection | ✅ round-trip + auto-emitted on body decode |
|
||||
| S9F9 | E↔H | ✅ | catalog + Connection | ✅ round-trip + auto-emitted on T3 timeout |
|
||||
| S9F11 | E↔H | ✅ | catalog + Connection | ✅ round-trip + auto-emitted on oversized frame |
|
||||
| S9F13 | E↔H | ✅ | catalog | ✅ round-trip |
|
||||
| S10F1 / S10F2 | H→E | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S10F3 / S10F4 | E→H | ✅ | catalog | ✅ round-trip + demo |
|
||||
| S10F5 / S10F6 | H→E | ✅ | catalog | ✅ round-trip |
|
||||
| S14F9 / S14F10 | H→E | ✅ | catalog | ✅ round-trip + demo (E94 CJ create) |
|
||||
| S14F11 / S14F12 | H→E | ✅ | catalog | ✅ round-trip + demo (E94 CJ delete) |
|
||||
| S16F5 / S16F6 | H→E | ✅ | catalog | ✅ round-trip (E40 PRJobCommand) |
|
||||
| S16F9 | E→H | ✅ | catalog + server | ✅ round-trip + auto-emitted per PJ transition (E40 PRJobAlert) |
|
||||
| S16F11 / S16F12 | H→E | ✅ | catalog | ✅ round-trip + demo (E40 PRJobCreate) |
|
||||
| S16F13 / S16F14 | H→E | ✅ | catalog | ✅ round-trip (E40 PRJobDequeue) |
|
||||
| S16F27 / S16F28 | H→E | ✅ | catalog | ✅ round-trip + demo (E94 CJobCommand) |
|
||||
149 SECS-II messages in the catalog, spanning streams 1, 2, 3, 5, 6, 7, 9, 10, 12, 14, 16.
|
||||
|
||||
| Pair | Direction | Status | Notes |
|
||||
|------------------|-----------|--------|-------|
|
||||
| S1F1 / S1F2 | H↔E | ✅ | round-trip + demo |
|
||||
| S1F3 / S1F4 | H→E | ✅ | round-trip + demo |
|
||||
| S1F11 / S1F12 | H→E | ✅ | round-trip + demo |
|
||||
| S1F13 / S1F14 | H↔E | ✅ | round-trip + demo |
|
||||
| S1F15 / S1F16 | H→E | ✅ | round-trip + demo |
|
||||
| S1F17 / S1F18 | H→E | ✅ | round-trip + demo |
|
||||
| S1F19 / S1F20 | H→E | ✅ | round-trip + demo (compliance self-report) |
|
||||
| S1F21 / S1F22 | H→E | ✅ | round-trip + demo |
|
||||
| S1F23 / S1F24 | H→E | ✅ | collection event namelist (CEID → VID) |
|
||||
| S2F13 / S2F14 | H→E | ✅ | EC values |
|
||||
| S2F15 / S2F16 | H→E | ✅ | EC set |
|
||||
| S2F17 / S2F18 | H→E | ✅ | clock |
|
||||
| S2F21 / S2F22 | H→E | ✅ | legacy remote command (no params) |
|
||||
| S2F23 / S2F24 | H→E | ✅ | trace initialize |
|
||||
| S2F25 / S2F26 | H→E | ✅ | loopback diagnostic |
|
||||
| S2F29 / S2F30 | H→E | ✅ | EC namelist |
|
||||
| S2F31 / S2F32 | H→E | ✅ | set time |
|
||||
| S2F33 / S2F34 | H→E | ✅ | define report |
|
||||
| S2F35 / S2F36 | H→E | ✅ | link event report |
|
||||
| S2F37 / S2F38 | H→E | ✅ | enable event |
|
||||
| S2F41 / S2F42 | H→E | ✅ | host command (modern) |
|
||||
| S2F43 / S2F44 | H→E | ✅ | reset spooling |
|
||||
| S2F45 / S2F46 | H→E | ✅ | define variable limits |
|
||||
| S2F47 / S2F48 | H→E | ✅ | request limit attrs |
|
||||
| S2F49 / S2F50 | H→E | ✅ | enhanced remote command (OBJSPEC + CPACK/CEPACK) |
|
||||
| S3F17 / S3F18 | H→E | ✅ | E87 carrier action |
|
||||
| S3F19 / S3F20 | H→E | ✅ | E87 slot map verify |
|
||||
| S3F21 / S3F22 | E→H | ✅ | E87 slot map report |
|
||||
| S3F23 / S3F24 | H→E | ✅ | E87 port group change |
|
||||
| S3F25 / S3F26 | H→E | ✅ | E87 carrier transfer |
|
||||
| S3F27 / S3F28 | H→E | ✅ | E87 cancel carrier |
|
||||
| S5F1 / S5F2 | E→H | ✅ | alarm send |
|
||||
| S5F3 / S5F4 | H→E | ✅ | enable alarm |
|
||||
| S5F5 / S5F6 | H→E | ✅ | list alarms |
|
||||
| S5F7 / S5F8 | H→E | ✅ | list enabled alarms |
|
||||
| S5F9 / S5F10 | E→H | ✅ | exception post |
|
||||
| S5F11 / S5F12 | E→H | ✅ | exception clear |
|
||||
| S5F13 / S5F14 | H→E | ✅ | exception recover request |
|
||||
| S5F15 / S5F16 | E→H | ✅ | exception recover complete |
|
||||
| S5F17 / S5F18 | H→E | ✅ | exception recover abort |
|
||||
| S6F1 / S6F2 | E→H | ✅ | trace data |
|
||||
| S6F5 / S6F6 | E→H | ✅ | multi-block inquire / grant |
|
||||
| S6F7 / S6F8 | H→E | ✅ | data transfer request / send |
|
||||
| S6F11 / S6F12 | E→H | ✅ | event report (unsolicited) |
|
||||
| S6F15 / S6F16 | H→E | ✅ | event report request (host-initiated) |
|
||||
| S6F19 / S6F20 | H→E | ✅ | individual report request |
|
||||
| S6F21 / S6F22 | H→E | ✅ | annotated individual report request |
|
||||
| S6F23 / S6F24 | H→E | ✅ | request spooled data |
|
||||
| S6F25 / S6F26 | E→H | ✅ | spool data ready (auto on re-SELECT) |
|
||||
| S7F1 / S7F2 | H→E | ✅ | PP load inquire / grant |
|
||||
| S7F3 / S7F4 | H→E | ✅ | PP send |
|
||||
| S7F5 / S7F6 | H→E | ✅ | PP request |
|
||||
| S7F17 / S7F18 | H→E | ✅ | PP delete |
|
||||
| S7F19 / S7F20 | H→E | ✅ | PP list |
|
||||
| S9F1, F3, F5, F7, F9, F11, F13 | E↔H | ✅ | protocol errors; auto-emitted on the documented conditions |
|
||||
| S10F1 / S10F2 | E→H | ✅ | terminal request (equipment originated) |
|
||||
| S10F3 / S10F4 | H→E | ✅ | terminal display single |
|
||||
| S10F5 / S10F6 | H→E | ✅ | terminal display multi |
|
||||
| S12F1–F19 | H↔E | ✅ | wafer maps — row, array, coord; setup, request, send, error |
|
||||
| S14F1 / S14F2 | H→E | ✅ | E39 GetAttr |
|
||||
| S14F3 / S14F4 | H→E | ✅ | E39 SetAttr |
|
||||
| S14F9 / S14F10 | H→E | ✅ | E94 CJ create |
|
||||
| S14F11 / S14F12 | H→E | ✅ | E94 CJ delete |
|
||||
| S16F5 / S16F6 | H→E | ✅ | E40 PRJobCommand |
|
||||
| S16F7 / S16F8 | H→E | ✅ | E40 PRJobMonitor |
|
||||
| S16F9 | E→H | ✅ | E40 PRJobAlert (auto on transition) |
|
||||
| S16F11 / S16F12 | H→E | ✅ | E40 PRJobCreate (full body) |
|
||||
| S16F13 / S16F14 | H→E | ✅ | E40 PRJobDequeue |
|
||||
| S16F15 / S16F16 | H→E | ✅ | E40 PRJobCreateMultiple |
|
||||
| S16F27 / S16F28 | H→E | ✅ | E94 CJobCommand |
|
||||
|
||||
---
|
||||
|
||||
@@ -265,60 +341,82 @@ walks ~20 SECS transactions end-to-end:
|
||||
23. `S1F15`/`S1F16` Request Offline.
|
||||
24. `Separate.req` → clean close on both sides.
|
||||
|
||||
Unit tests: **148 cases / 794 assertions pass** (`docker compose run --rm tests`).
|
||||
Unit tests: **291 cases / 1515 assertions pass** (`docker compose run --rm tests`).
|
||||
The suite includes integration tests that drive a real `hsms::Connection`
|
||||
over a loopback socket pair to verify the E37 §7.2 / §7.4 / §7.7
|
||||
edge cases (Select.req while already SELECTED → AlreadyActive, Deselect.req
|
||||
while NOT_SELECTED → NotEstablished, Reject.req for unsupported SType /
|
||||
PType, Reject.req for data while NOT_SELECTED) — not just the happy path.
|
||||
edge cases — not just the happy path.
|
||||
The E30 §6.5 Communication state machine is unit-tested independently of
|
||||
the transport (timer firings simulated via test callbacks).
|
||||
|
||||
---
|
||||
|
||||
## 7. Explicitly out of scope (with reasons)
|
||||
## 7. Interoperability with secsgem-py 0.3.0
|
||||
|
||||
These look like gaps but are deliberate. None of them blocks the GEM
|
||||
The `interop/` harness (see `interop/README.md`) cross-validates the
|
||||
codebase against the reference Python implementation in Docker:
|
||||
|
||||
- **secsgem-py active host → C++ passive server**: 24 named checks
|
||||
across S1/S2/S5/S6/S7/S10 plus unsolicited S5F1/S6F11. Three
|
||||
consecutive clean runs.
|
||||
- **C++ active host → secsgem-py passive equipment**: HSMS select +
|
||||
S1F13 + S1F1 + S1F3 + clean separate; exits 0.
|
||||
- **C++ active host → raw GEM 300 streams** (`raw_gem300_harness.py`):
|
||||
S3 (E87), S14 (E94), S16 (E40), S12 (wafer maps) round-tripped
|
||||
through secsgem-py's raw HSMS layer with hand-crafted bodies because
|
||||
secsgem-py's high-level API doesn't expose these streams.
|
||||
|
||||
Bugs surfaced by the interop sweep (now fixed): strict per-width
|
||||
parsing rejected U1-encoded identifiers (SEMI E5 allows
|
||||
`U1|U2|U4|U8`); PPBODY-as-ASCII was rejected; S1F23/F24 wasn't
|
||||
implemented; S10F3 (host→equipment Terminal Display Single) wasn't
|
||||
wired (we had S10F1 in the wrong direction).
|
||||
|
||||
---
|
||||
|
||||
## 8. Explicitly out of scope (with reasons)
|
||||
|
||||
These look like gaps but are deliberate. None blocks the GEM
|
||||
compliance claim.
|
||||
|
||||
| Item | Why it's out of scope |
|
||||
|---------------------------------------|----------------------|
|
||||
| Material Movement (E30 §6.18) | The job-management half is now in (E40 + E94, §4a). The remaining pieces — **E87 carrier management** and **E90 substrate tracking** — are separate SEMI standards layered on top of E30 and remain Layer-5 follow-ons per `implementation_plan.md`. |
|
||||
| Multi-block SECS-I transfers | Multi-block (S6F5/F6, S6F7/F8 etc.) is a **SECS-I** concept for 244-byte serial frames. HSMS allows arbitrarily large bodies (up to the codebase's 16 MiB cap), so multi-block is structurally not needed. E37-based GEM equipment does not require it. |
|
||||
| Multi-block SECS-I transfers | Multi-block is a **SECS-I** concept for 244-byte serial frames. HSMS allows arbitrarily large bodies (up to the codebase's 16 MiB cap), so multi-block is structurally not needed. E37-based GEM equipment does not require it. |
|
||||
| HSMS-GS (multi-session) | Out of scope — modern HSMS-SS covers virtually all current GEM equipment. |
|
||||
| Equipment Processing States (concrete states) | E30 §6.3 says the specific states are tool-defined. We provide the engine (`ControlTransitionTable` + the YAML loader); equipment vendors load their concrete states (IDLE / SETUP / READY / EXECUTING / PAUSE / ...) the same way `data/control_state.yaml` is loaded today. Spec-compliant either way. |
|
||||
| Persistent on-disk spool | The runtime spool is in-memory; an equipment restart loses queued events. Real fab equipment would back it with a journal. Standard does not mandate persistence. |
|
||||
| E42 Enhanced Process Programs (S7F23–F26) | A separate SEMI standard. E30 GEM Process Program Management only requires the unformatted set (S7F3/F5/F19), which we have. |
|
||||
| S10F7 Broadcast Terminal Display | Rarely used; equipment vendors typically forgo it. Not required for the Terminal Services capability. |
|
||||
| Equipment Processing States (concrete states) | E30 §6.3 says the specific states are tool-defined. We provide the engine (`ControlTransitionTable` + the YAML loader); equipment vendors load their concrete states (IDLE / SETUP / READY / EXECUTING / PAUSE / …) the same way `data/control_state.yaml` is loaded today. Spec-compliant either way. |
|
||||
| E42 Enhanced Process Programs (S7F23–F26) | A separate SEMI standard. E30 GEM Process Program Management only requires the unformatted set (S7F1/F3/F5/F17/F19), which we have. |
|
||||
| S10F7 Broadcast Terminal Display | Rarely used; equipment vendors typically forgo it. Not required for the Terminal Services capability. |
|
||||
|
||||
---
|
||||
|
||||
## 8. What "100% GEM-compliant" honestly means here
|
||||
## 9. What "100% GEM-compliant" honestly means here
|
||||
|
||||
Every GEM Fundamental and every GEM Additional capability that the E30
|
||||
specification defines with a concrete SECS-II message set is implemented,
|
||||
round-trip-tested, and demonstrated in the two-container demo. The five
|
||||
remaining items in §7 are all either separate SEMI standards layered on
|
||||
top of E30 (E40/E42), HSMS-irrelevant SECS-I features, or deliberate
|
||||
quality-of-implementation choices (persistent spool, broadcast terminal,
|
||||
JIS-8) that the spec does not require.
|
||||
round-trip-tested, demonstrated in the two-container demo, AND
|
||||
cross-validated against secsgem-py 0.3.0 on the overlap. Every GEM 300
|
||||
standard in scope (E40, E87, E90, E94, E116, E120, E148, E157, E84) is
|
||||
implemented end-to-end with its state machine, store, wire messages,
|
||||
dispatch, and tests. Persistent spool, exception recovery (S5F13–F18 +
|
||||
ExceptionStateMachine), and the SML parser are all upstream-absent in
|
||||
secsgem-py.
|
||||
|
||||
What this codebase does **not** demonstrate, and what a real "GEM-compliant"
|
||||
marketing claim would still need:
|
||||
What this codebase does **not** demonstrate, and what a real
|
||||
"GEM-compliant" marketing claim would still need:
|
||||
|
||||
1. **Conformance against a GEM Reference Test System (RTS) or equivalent
|
||||
third-party validator**, on a representative tool. The codebase
|
||||
provides the message catalog + the runtime; running a conformance
|
||||
generator (Layer 4 of `implementation_plan.md`) against a real
|
||||
physical or simulated tool is how compliance gets *certified*.
|
||||
1. **Conformance against a GEM Reference Test System (RTS) or
|
||||
equivalent third-party validator**, on a representative tool. The
|
||||
codebase provides the message catalog + the runtime; running a
|
||||
conformance generator (Layer 4 of `implementation_plan.md`) against
|
||||
a real physical or simulated tool is how compliance gets
|
||||
*certified*.
|
||||
2. **Per-vendor application code** that connects the generic stores to
|
||||
the equipment's real sensors, recipe engine, alarm sources, and
|
||||
processing state model. The codebase provides the data model and
|
||||
processing state model. The codebase provides the data model and
|
||||
the dispatcher; the application is what makes a specific tool
|
||||
GEM-compliant.
|
||||
|
||||
In short: this is a **GEM-conformant runtime stack** with the first
|
||||
slice of GEM300 (E40 / E94), not a GEM-conformant *tool*. Pointing the
|
||||
runtime at a real piece of equipment, populating the YAML files with
|
||||
the tool's real SVIDs / ECIDs / alarms / capabilities / PJ + CJ
|
||||
behaviour, and wiring the application callbacks completes the picture.
|
||||
In short: this is a **GEM-conformant runtime stack with the full GEM
|
||||
300 suite**, not a GEM-conformant *tool*. Pointing the runtime at a
|
||||
real piece of equipment, populating the YAML files with the tool's
|
||||
real SVIDs / ECIDs / alarms / capabilities / job behaviour, and wiring
|
||||
the application callbacks completes the picture.
|
||||
|
||||
Reference in New Issue
Block a user