Six more chapters finishing Part 2. Together with chapters 10–13
they document every SEMI standard this codebase implements.
14 — E40 + E94: process jobs (8-state lifecycle, S16F11/F5/F7/F9
on the wire) and control jobs (CJ wraps PJs with batch policy,
S14F9/S16F27 messages). Worked cascade showing how CJSTART
propagates through the PJ FSM and triggers S6F11 CEIDs at each
transition.
15 — E87 carriers: three orthogonal sub-machines (CarrierID,
SlotMap, CarrierAccess) per carrier and three more (Transfer,
Reservation, Association) per load port. S3F17 CarrierAction
strings + CAACK codes, S3F19 SlotMap verify, the 5-state slot
encoding, multi-port concurrency.
16 — E90 + E157: substrate tracking via three orthogonal axes
(STS / SPS / SubstrateIDStatus) and module process tracking
(NotExecuting / GeneralExecuting / StepExecuting / StepCompleted).
End-to-end PVD example showing E40 + E157 + E90 transitions
cascading into CEIDs.
17 — E116 + E120 + E39: equipment performance time-buckets across
six states, common equipment model object hierarchy, S14F1/F3
GetAttr/SetAttr as the uniform wire access for any object type
across multiple standards.
18 — E84 parallel I/O: ten signal lines, the 9-state handshake
FSM, the three TA1/TA2/TA3 timing-critical timers, why a physical
handshake gets modeled in software (testability, timer enforcement,
CEID emission, multi-port concurrency), the pure-FSM + asio-adapter
split.
19 — E42 + E148 + S5F9–F18: formatted recipes (S7F23/F25 typed
PPBODY), time synchronization with 16-char + 14-char accepted on
set, exception recovery as a persistent multi-step host-supervised
FSM (Posted → Recovering → Cleared with abort/retry). Revisits
the auto-S9 family and contrasts S9 (transport) vs S5F9
(application).
Co-Authored-By: Claude Opus 4.7 <noreply@anthropic.com>
