# ACME-PVD-3000 — example data dictionary for a fictional Physical
# Vapor Deposition tool.  Designed to look like a real fab tool, not a
# unit-test fixture.  Read this alongside main.cpp to see how each
# entry is wired to behaviour.
#
# Topology:
#   - One process chamber, single-wafer
#   - Four load ports, each accepting a 25-slot FOUP
#   - Three deposition recipes (Al / Ti / Cu)
#
# Real PVD tools have hundreds of SVIDs.  This one ships 30 — enough
# to demonstrate every wiring pattern (status, derived, setpoint,
# event, alarm, recipe, host command) without burying the example.

device:
  id: 0
  model_name: "ACME-PVD-3000"
  software_rev: "1.4.2"
  equipment_type: "PVD"

# E30 §6.10 — what the equipment self-reports to the host on S1F19.
# CCODE values follow E30 Appendix A.
capabilities:
  - {code: 1,  name: "Establish Communications"}
  - {code: 2,  name: "Dynamic Event Report Configuration"}
  - {code: 3,  name: "Variable Data Collection"}
  - {code: 5,  name: "Status Data Collection"}
  - {code: 6,  name: "Alarm Management"}
  - {code: 7,  name: "Remote Control"}
  - {code: 8,  name: "Equipment Constants"}
  - {code: 9,  name: "Process Program Management"}
  - {code: 11, name: "Equipment Terminal Services"}
  - {code: 12, name: "Clock"}
  - {code: 14, name: "Spooling"}
  - {code: 15, name: "Control (operator initiated)"}
  - {code: 40, name: "E40 Process Job Management"}
  - {code: 87, name: "E87 Carrier Management"}
  - {code: 90, name: "E90 Substrate Tracking"}
  - {code: 94, name: "E94 Control Job Management"}
  - {code: 116, name: "E116 Equipment Performance Tracking"}
  - {code: 148, name: "E148 Time Synchronization"}
  - {code: 157, name: "E157 Module Process Tracking"}

# Status variables — read-only, host queries via S1F3.
# main.cpp updates the sensor values on a poll loop.
svids:
  # Mandatory framework SVIDs
  - {id: 1, name: ControlState,    units: "",       type: ASCII, value: ""}
  - {id: 2, name: Clock,           units: "",       type: ASCII, value: ""}
  - {id: 3, name: EventsEnabled,   units: "",       type: BOOLEAN, value: true}
  # Equipment-defined
  - {id: 10, name: ProcessChamberPressureTorr, units: "Torr", type: F4, value: 1.0e-7}
  - {id: 11, name: ProcessChamberTemperatureC, units: "C",    type: F4, value: 23.5}
  - {id: 12, name: LoadlockPressureTorr,       units: "Torr", type: F4, value: 760.0}
  - {id: 13, name: VacuumPumpRpm,              units: "rpm",  type: U4, value: 0}
  - {id: 20, name: SourcePowerWatts,           units: "W",    type: F4, value: 0.0}
  - {id: 21, name: TargetVoltageVolts,         units: "V",    type: F4, value: 0.0}
  - {id: 22, name: SubstrateBiasVolts,         units: "V",    type: F4, value: 0.0}
  - {id: 23, name: SourceTargetMaterial,       units: "",     type: ASCII, value: "None"}
  - {id: 30, name: ArgonFlowSccm,              units: "sccm", type: F4, value: 0.0}
  - {id: 31, name: NitrogenFlowSccm,           units: "sccm", type: F4, value: 0.0}
  - {id: 32, name: CoolingWaterFlowLpm,        units: "L/min", type: F4, value: 12.5}
  - {id: 40, name: ChuckTemperatureC,          units: "C",    type: F4, value: 24.0}
  - {id: 41, name: ShieldTemperatureC,         units: "C",    type: F4, value: 24.0}
  - {id: 50, name: WafersProcessedTotal,       units: "wafer", type: U4, value: 0}
  - {id: 51, name: WafersProcessedSinceCleanup, units: "wafer", type: U4, value: 0}
  - {id: 52, name: ChamberHoursSinceCleanup,   units: "h",    type: F4, value: 0.0}
  - {id: 53, name: ActiveRecipePpid,           units: "",     type: ASCII, value: ""}
  - {id: 54, name: RecipeStepName,             units: "",     type: ASCII, value: ""}
  - {id: 55, name: RecipeStepElapsedSec,       units: "s",    type: U4, value: 0}
  - {id: 60, name: LoadPort1Active,            units: "",     type: BOOLEAN, value: false}
  - {id: 61, name: LoadPort2Active,            units: "",     type: BOOLEAN, value: false}
  - {id: 62, name: LoadPort3Active,            units: "",     type: BOOLEAN, value: false}
  - {id: 63, name: LoadPort4Active,            units: "",     type: BOOLEAN, value: false}
  - {id: 70, name: EptStateName,               units: "",     type: ASCII, value: "Standby"}
  - {id: 71, name: ProductiveHoursTotal,       units: "h",    type: F4, value: 0.0}
  - {id: 72, name: UnscheduledDowntimeHours,   units: "h",    type: F4, value: 0.0}

# Data variables — same shape as SVIDs but conceptually "intermediate
# data" rather than equipment status.  Reported via S1F21/F22.
dvids:
  - {id: 200, name: LastCycleTimeSec,      units: "s",      type: F4, value: 0.0}
  - {id: 201, name: AverageCycleTimeSec,   units: "s",      type: F4, value: 0.0}
  - {id: 202, name: BatchYieldPercent,     units: "%",      type: F4, value: 0.0}
  - {id: 203, name: LastWaferProcessedId,  units: "",       type: ASCII, value: ""}
  - {id: 204, name: ProcessChamberLeakRate, units: "Torr/s", type: F4, value: 1.0e-9}

# Equipment constants — host-settable parameters.  S2F15 set, S2F13 read.
ecids:
  - {id: 100, name: ChamberBasePressureSetpoint, units: "Torr", type: F4, value: 1.0e-7, min: "1.0e-9", max: "1.0e-5"}
  - {id: 101, name: ChamberTempSetpointC,         units: "C",    type: F4, value: 25.0,   min: "15.0", max: "40.0"}
  - {id: 102, name: SourcePowerSetpointW,         units: "W",    type: F4, value: 1500.0, min: "0.0",  max: "5000.0"}
  - {id: 103, name: T_CRA_Seconds,                units: "s",    type: U4, value: 30,     min: "5",    max: "120"}
  - {id: 104, name: T_DELAY_Seconds,              units: "s",    type: U4, value: 10,     min: "5",    max: "60"}
  - {id: 105, name: CleaningIntervalWafers,       units: "wafer", type: U4, value: 500,   min: "100",  max: "2000"}
  - {id: 106, name: MaxRecipeRetries,             units: "",     type: U4, value: 3,      min: "0",    max: "10"}

# Collection events.  CEID → linked report binding happens at runtime
# via S2F33/F35/F37; the equipment fires S6F11 on transitions through
# main.cpp's event-emit hooks.
ceids:
  # Control / lifecycle
  - {id: 100, name: ControlStateChanged}
  - {id: 200, name: AlarmSet}
  - {id: 201, name: AlarmCleared}
  # Process lifecycle
  - {id: 300, name: ProcessStarted}
  - {id: 301, name: ProcessCompleted}
  - {id: 302, name: ProcessAborted}
  - {id: 303, name: ProcessPaused}
  - {id: 304, name: ProcessResumed}
  - {id: 310, name: RecipeStepStarted}
  - {id: 311, name: RecipeStepCompleted}
  # Material movement
  - {id: 400, name: ControlJobExecuting}
  - {id: 401, name: ControlJobCompleted}
  - {id: 410, name: CarrierLoaded}
  - {id: 411, name: CarrierUnloaded}
  - {id: 420, name: SubstrateAtSource}
  - {id: 421, name: SubstrateInProcess}
  - {id: 422, name: SubstrateProcessed}
  # Equipment performance (E116)
  - {id: 500, name: EptEnteredProductive}
  - {id: 501, name: EptEnteredStandby}
  - {id: 502, name: EptEnteredEngineering}
  - {id: 503, name: EptEnteredUnscheduledDowntime}

# Alarms.  Categories follow E5 §10.3 ALCD lower-7 bitmap:
#   0x01 PersonalSafety   0x02 EquipmentSafety   0x04 ParameterError
#   0x08 ParameterWarning 0x10 Irrecoverable     0x20 EquipmentStatus
#   0x40 Attention
alarms:
  - {id: 1,  text: "Chamber pressure high (above setpoint)",       category: 0x04}
  - {id: 2,  text: "Chamber pressure low (below setpoint)",         category: 0x04}
  - {id: 3,  text: "Chamber temperature out of range",              category: 0x04}
  - {id: 4,  text: "Source power loss during process",              category: 0x12}  # safety + error
  - {id: 5,  text: "Cooling water flow loss",                       category: 0x02}  # equip safety
  - {id: 6,  text: "Vacuum pump failure",                           category: 0x12}
  - {id: 7,  text: "Door open during process",                       category: 0x01}  # personal safety
  - {id: 8,  text: "Target end-of-life",                            category: 0x40}  # attention
  - {id: 9,  text: "Recipe step timeout",                            category: 0x08}  # warning
  - {id: 10, text: "Cleaning interval exceeded (500 wafers)",       category: 0x40}
  - {id: 11, text: "Load port 1 carrier mis-clocked",                category: 0x20}
  - {id: 12, text: "Substrate scanner unavailable",                  category: 0x20}

# Recipes.  The body is a placeholder string in this example; real
# tools would store binary recipe bundles (E42 formatted PP) here.
# The recipe runner in main.cpp parses the body line-by-line.
recipes:
  - id: "AL-METALLIZATION-V3"
    body: |
      STEP PUMPDOWN          duration=120s    target=1.0e-7
      STEP HEAT-SUBSTRATE    duration=60s     target=300C
      STEP SOURCE-PREHEAT    duration=30s     power=500W
      STEP DEPOSIT-AL        duration=180s    power=2500W gas=Argon flow=50sccm
      STEP COOL              duration=120s    target=25C
      STEP VENT              duration=60s     target=760
      END
  - id: "TI-BARRIER-V2"
    body: |
      STEP PUMPDOWN          duration=120s    target=1.0e-7
      STEP HEAT-SUBSTRATE    duration=60s     target=350C
      STEP DEPOSIT-TI        duration=90s     power=1800W gas=Argon flow=40sccm
      STEP COOL              duration=120s    target=25C
      STEP VENT              duration=60s     target=760
      END
  - id: "CU-SEED-V1"
    body: |
      STEP PUMPDOWN          duration=120s    target=1.0e-7
      STEP HEAT-SUBSTRATE    duration=60s     target=250C
      STEP DEPOSIT-CU        duration=240s    power=3000W gas=Argon flow=60sccm
      STEP COOL              duration=120s    target=25C
      STEP VENT              duration=60s     target=760
      END

# Host commands.  `emit_ceid` fires the named CEID after dispatch;
# `set_alarm` sets an alarm.  `force_spool` is the demo-only test hook.
host_commands:
  - {name: START,         ack: Accept, emit_ceid: 300}
  - {name: STOP,          ack: Accept, emit_ceid: 301}
  - {name: PAUSE,         ack: Accept, emit_ceid: 303}
  - {name: RESUME,        ack: Accept, emit_ceid: 304}
  - {name: ABORT,         ack: Accept, emit_ceid: 302}
  - {name: CLEAN_CHAMBER, ack: Accept}
  - {name: FAULT,         ack: Accept, set_alarm: 4}     # injected fault for demo
  - {name: SPOOL_ON,      ack: Accept, force_spool: true}
  - {name: SPOOL_OFF,     ack: Accept, force_spool: false}

# Spool (E30 §6.22) — when the host disconnects, queue these streams
# for later drain via S6F23.
spool:
  max_size: 1000
  spoolable_streams: [5, 6]

# Auto-fire CEID 100 on every control-state change.
emit_on_control_change: 100