SECS/GEM Compliance
A per-capability accounting against the foundational SEMI standards
E5 (SECS-II), E30 (GEM), E37 (HSMS), E4 (SECS-I), plus
the full GEM 300 stack: E40 (process jobs), E94 (control jobs),
E87 (carriers), E90 (substrates), E116 (equipment
performance tracking), E120 (common equipment model), E157
(module process tracking), E84 (parallel I/O), E148 (time
synchronization), E39 (object services), plus E5 §13 wafer maps.
Status. Every GEM Fundamental and every GEM Additional capability
that E30 binds to a concrete SECS-II message set is implemented, and
every GEM 300 standard the project sets out to cover is implemented
end-to-end (state machines + stores + wire messages + dispatch). See
§8 for the items deliberately out of scope and §9 for what
"100% GEM-compliant" can and cannot honestly mean about a codebase.
Legend:
- ✅ Full — implemented to the spec; round-trip-tested.
- 🟡 Partial — implemented in the demo path with a documented limitation.
- ⬜ Out of scope — deliberately not implemented; reason given.
1. E37 — HSMS transport
| Item |
Status |
Spec ref |
Notes |
| TCP transport |
✅ |
E37 §6 |
hsms::Connection over standalone Asio. |
| 4-byte length prefix + 10-byte header |
✅ |
E37 §8.2 |
hsms::Frame::encode/decode. |
| Session ID, byte2, byte3, PType, SType, system-bytes |
✅ |
E37 §8.3 |
hsms::Header. |
Select.req / .rsp |
✅ |
E37 §7.2 |
SType 1/2; SelectStatus enum (0–3). |
Deselect.req / .rsp |
✅ |
E37 §7.4 |
SType 3/4; DeselectStatus enum (0–2). |
Linktest.req / .rsp |
✅ |
E37 §7.5 |
SType 5/6; periodic interval configurable. |
Separate.req |
✅ |
E37 §7.6 |
SType 9; graceful close after flush. |
Reject.req |
✅ |
E37 §7.7 |
Emitted on data-while-NOT-SELECTED. |
| Connection state machine NOT-CONNECTED → NOT-SELECTED → SELECTED |
✅ |
E37 §6.3 |
Both Active and Passive modes. |
| T3 reply timeout |
✅ |
E37 §10 |
Per-transaction steady_timer. |
| T5 connect separation timeout |
✅ |
E37 §10 |
Client::schedule_retry. |
| T6 control transaction timeout |
✅ |
E37 §10 |
One concurrent control transaction. |
| T7 not-selected timeout (passive) |
✅ |
E37 §10 |
Armed on connect / on Deselect.req. |
| T8 intercharacter timeout |
✅ |
E37 §10 |
Bounds the payload read after length prefix. |
| HSMS-SS (single-session) |
✅ |
E37 §11 |
Default mode: the constructor registers a single session. |
| HSMS-GS (general-session) |
✅ |
E37 §11 |
Connection::add_session(device_id) registers extra sessions; per-session SELECTED state + message handlers; Select.req carries session_id=device_id in GS mode. |
1a. E4 — SECS-I transport (block protocol)
| Item |
Status |
Spec ref |
Notes |
| 10-byte block header (R/W/E bits, system bytes) |
✅ |
E4 §6.2 |
secsi::Header with bit-precise pack/unpack. |
| Length-prefixed block + 2-byte checksum |
✅ |
E4 §6.1, §6.3 |
secsi::Block::encode/decode. |
| Multi-block message split / assemble |
✅ |
E4 §7.2.3 |
split_message / assemble_message; E-bit only on the final block. |
| ENQ/EOT/ACK/NAK handshake |
✅ |
E4 §7.1 |
secsi::Protocol half-duplex FSM. |
| RTY retry counter |
✅ |
E4 §10.2 |
Per-block retry budget, exhaust → ActionRaiseError. |
| T1 inter-character timer hook |
✅ |
E4 §10.1 |
Drained in RecvBlock; host wires the actual asio timer. |
| T2 protocol timer hook |
✅ |
E4 §10.1 |
Triggers a retry from any send state. |
| T3 reply timer |
✅ |
E4 §10.1 |
FSM tracks system_bytes of outstanding W=1 primaries; arms T3 on send-complete, cancels on matching reply, aborts on expiry. |
| T4 inter-block timer |
✅ |
E4 §10.1 |
FSM arms T4 when a block delivers with end_block=false; cancels when the next block arrives, aborts on expiry. |
| Master/slave contention resolution |
✅ |
E4 §7.1.4 |
Slave yields on simultaneous ENQ; master holds. |
| Serial port wiring (asio) |
⬜ |
— |
FSM is IO-free; serial integration is a wiring follow-up. |
| TCP tunnel for testing |
✅ |
— |
secsi::TcpTransport wraps the FSM behind an asio TCP socket; mirrors secsgem-py's secsitcp/. |
2. E5 — SECS-II encoding
| Item |
Status |
Spec ref |
Notes |
| Format byte + 1/2/3 length bytes |
✅ |
E5 §9 |
secs2::encode_into. |
List (L) |
✅ |
E5 §9.3 |
Recursive. |
ASCII (A) |
✅ |
E5 §9.5 |
|
Binary (B) |
✅ |
E5 §9.5 |
|
Boolean (BOOLEAN) |
✅ |
E5 §9.5 |
|
U1, U2, U4, U8 (big-endian) |
✅ |
E5 §9.5 |
Identifier parsers accept any width per the SEMI wildcard rule. |
I1, I2, I4, I8 (big-endian, two's complement) |
✅ |
E5 §9.5 |
Same lenient-width policy. |
F4, F8 (IEEE 754 big-endian) |
✅ |
E5 §9.5 |
bit-cast round-trip. |
| JIS-8 (single-byte JIS text) |
✅ |
E5 §9.5 |
Format::JIS8 (0x11); shares std::string storage with ASCII, disambiguated by Format. |
| C2 (Unicode 2-byte code points) |
✅ |
E5 §9.5 |
Format::C2 (0x12); big-endian uint16_t code points. |
| SML text rendering |
✅ |
E5 Annex |
secs2::to_sml. JIS-8 prints as <J "...">, C2 as <C 65 66 ...>. |
SML parser (inverse of to_sml) |
✅ |
— |
secs2::from_sml; round-trips every format. |
| `ASCII |
Binary` wildcard fields |
✅ |
E5 |
3. E30 — GEM Fundamental capabilities (§5.2)
| Fundamental Capability |
Status |
Spec ref |
Messages |
Notes |
| State models |
✅ |
E30 §6.2 |
— |
E30 control state machine (5 states) + HSMS communication state machine. |
| Equipment Processing States |
✅ |
E30 §6.3 |
— |
ControlTransitionTable engine; vendors load their tool-specific states (IDLE/SETUP/READY/EXECUTING/PAUSE/…) via a second YAML file using the same loader. The spec leaves the concrete states tool-specific. |
| Host-Initiated S1F13/F14 scenario |
✅ |
E30 §6.5 |
S1F13/F14 |
|
| Event Notification |
✅ |
E30 §6.6 |
S6F11/F12 |
Equipment-initiated, host-acknowledged. |
| On-Line Identification |
✅ |
E30 §6.7 |
S1F1/F2 |
MDLN + SOFTREV. |
| Error Messages |
✅ |
E30 §6.9 |
S9F* |
Auto-emission of S9F3/F5/F7/F9/F11 on the documented protocol-error conditions; S9F1/F13 in the catalog for explicit emission. |
| Documentation |
✅ |
E30 §6.10 |
S1F19/F20, S1F21/F22, S1F23/F24 |
Equipment self-reports compliance, DVID namelist, AND collection-event namelist (CEID → VIDs). |
| Control (Operator-Initiated) |
✅ |
E30 §6.2 |
— |
ControlStateMachine::operator_online/offline/local/remote. |
4. E30 — GEM Additional capabilities (§5.3)
| Additional Capability |
Status |
Spec ref |
Messages |
Notes |
| Establish Communications |
✅ |
E30 §6.5 |
S1F13/F14 |
Both directions modeled; COMMACK enum. Backed by the E30 §6.5 Communication state machine (gem::CommunicationStateMachine) with DISABLED / WAIT-CRA / WAIT-DELAY / COMMUNICATING substates and the T_CRA + T_DELAY retry timers, separate from HSMS connection state. |
| Dynamic Event Report Configuration |
✅ |
E30 §6.6 |
S2F33/F34, S2F35/F36, S2F37/F38 |
Full Define-Report / Link-Event / Enable-Event pipeline with all four ack enums. Host-initiated readback via S6F15/F16, S6F19/F20, S6F21/F22. |
| Variable Data Collection |
✅ |
E30 §6.11 |
S1F21/F22 |
DVID namelist + DVID values resolvable via EquipmentDataModel::vid_value. |
| Trace Data Collection |
✅ |
E30 §6.12 |
S2F23/F24, S6F1/F2 |
TraceStore keeps active TRID→TraceConfig; periodic sampling left to the application's scheduler. |
| Status Data Collection |
✅ |
E30 §6.13 |
S1F3/F4, S1F11/F12 |
|
| Alarm Management |
✅ |
E30 §6.14 |
S5F1/F2, S5F3/F4, S5F5/F6, S5F7/F8 |
Full set. ALCD bit-7 set/cleared, lower-7 category. |
| Remote Control |
✅ |
E30 §6.15 |
S2F41/F42, S2F49/F50, S2F21/F22 |
Modern (CPACK), enhanced (OBJSPEC + CEPACK), and legacy (no params) forms all dispatched against the same HostCommandRegistry. |
| Equipment Constants |
✅ |
E30 §6.16 |
S2F13/F14, S2F15/F16, S2F29/F30 |
EAC range validation against min_str/max_str for numeric ECs. |
| Process Program Management |
✅ |
E30 §6.17 |
S7F1/F2, S7F3/F4, S7F5/F6, S7F17/F18, S7F19/F20, S7F23/F24, S7F25/F26 |
Unformatted PP load-inquire/send/request/delete/list + E42 enhanced (formatted) PP send/request via S7F23-F26. RecipeStore carries both views simultaneously. |
| Material Movement |
✅ |
E30 §6.18 |
(see §4a-4h) |
Now fully covered: process jobs (E40), control jobs (E94), carriers (E87), substrates (E90), modules (E157). |
| Equipment Terminal Services |
✅ |
E30 §6.19 |
S10F1/F2, S10F3/F4, S10F5/F6 |
Single-line both directions + multi-line host→equipment. S10F7 broadcast intentionally omitted (rarely used). |
| Clock |
✅ |
E30 §6.20 |
S2F17/F18, S2F31/F32 |
16-char (YYYYMMDDhhmmsscc) and 14-char accepted on set. Drift tracking + quality via E148 (§4g). |
| Limits Monitoring |
✅ |
E30 §6.21 |
S2F45/F46, S2F47/F48 |
LimitMonitorStore keyed by VID with multiple LimitDefinition (LIMITID + upper/lower as arbitrary Items). |
| Spooling |
✅ |
E30 §6.22 |
S2F43/F44, S6F23/F24, S6F25/F26 |
Per-stream whitelist, FIFO queue, host-driven transmit/purge, S6F25 auto-emitted on re-SELECT when non-empty. Persistent: opt-in file-backed journal (SpoolStore::enable_persistence(dir)) survives equipment restarts. |
| Control |
✅ |
E30 §6.2 |
— |
See Fundamental. |
4a. E40 Process Jobs
| Capability |
Status |
Spec ref |
Messages |
Notes |
| PJ state model |
✅ |
E40 §6.3 |
— |
8 states (Queued, SettingUp, WaitingForStart, Processing, ProcessComplete, Paused, Stopping, Aborting); state byte matches PRJOBSTATE on the wire. |
| PRJobCreate (full body) |
✅ |
E40 §10.2 |
S16F11/F12 |
Full E40-0705 body: <L,5 PRJOBID MF PRRECIPEMETHOD <L,2 PPID <L RCPVARLIST>> <L MTRLOUTSPEC> <L PRPROCESSPARAMS>>. PPID validated against RecipeStore. |
| PRJobCreateMultiple |
✅ |
E40 §10 |
S16F15/F16 |
Bulk variant; per-job ACK list. |
| PRJobDequeue |
✅ |
E40 §10.2 |
S16F13/F14 |
Only legal while PJ is QUEUED. |
| PRJobMonitor |
✅ |
E40 §10 |
S16F7/F8 |
Per-PJ alert enable/disable. |
| PRJobCommand |
✅ |
E40 §10.2 |
S16F5/F6 |
PRCMD strings PJSTART/PJPAUSE/PJRESUME/PJSTOP/PJABORT/PJHOQ. |
| PRJobAlert |
✅ |
E40 §10.3 |
S16F9 |
Equipment-initiated one-way (W=0). Fires automatically on every PJ state transition. |
4b. E94 Control Jobs
| Capability |
Status |
Spec ref |
Messages |
Notes |
| CJ state model |
✅ |
E94 §6 |
— |
9 states; CJ owns an ordered prjobids list. |
| CreateObject (CJ) |
✅ |
E94 §6.4 |
S14F9/F10 |
Body <L,2 CTLJOBID L,n PRJOBIDs>. |
| DeleteObject (CJ) |
✅ |
E94 §6.4 |
S14F11/F12 |
|
| CJobCommand |
✅ |
E94 §6.4 |
S16F27/F28 |
CTLJOBCMD: CJSTART, CJPAUSE, CJRESUME, CJSTOP, CJABORT. |
| CJ CEID emission |
✅ |
— |
S6F11 |
ControlJobExecuting (CEID 400) and ControlJobCompleted (CEID 401) fire on CJ state transitions via the existing event-report pipeline. |
4c. E87 Carrier Management
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Carrier state model |
✅ |
E87 §6 |
— |
CarrierStateMachine + LoadPortStateMachine; CIDS, CSMS, CASS, LPRS, LPTS axes. |
| CarrierAction |
✅ |
E87 §10.2 |
S3F17/F18 |
ProceedWithCarrier, CancelCarrier, BindCarrierID. |
| Slot Map Verify |
✅ |
E87 §10 |
S3F19/F20 |
Equipment compares against stored slots; drives CSMS NotRead → Read/Mismatched. |
| Slot Map Report |
✅ |
E87 §10 |
S3F21/F22 |
Equipment notifies host of read slot map; host acks. |
| Port Group Change |
✅ |
E87 §10.4 |
S3F23/F24 |
Host modifies load-port grouping; PortGroupAck. |
| Carrier Transfer |
✅ |
E87 §10 |
S3F25/F26 |
Move carrier between ports; fires Start{Un}Loading transfer events. |
| Cancel Carrier |
✅ |
E87 §10 |
S3F27/F28 |
Drives CancelCarrier ID event + Cancel access event. |
4d. E90 Substrate Tracking
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Substrate state model |
✅ |
E90 §6 |
— |
Three axes: location (AtSource/AtWork/AtDestination), processing (NeedsProcessing/InProcess/Processed/Aborted/Stopped/Rejected/Lost/Skipped), id-status (Confirmed/Unconfirmed/Lost). |
| SubstrateHistory |
✅ |
— |
— |
Per-substrate append-only ring buffer of state transitions. |
| Standard CEIDs |
✅ |
E90 §7 |
S6F11 |
All E90 CEIDs emitted on transition; observable host-side. |
4e. E116 Equipment Performance Tracking
| Capability |
Status |
Spec ref |
Messages |
Notes |
| EPT state machine |
✅ |
E116 §6 |
— |
NonScheduledTime / ScheduledDowntime / UnscheduledDowntime / Engineering / Standby / Productive. |
| Time-bucket accounting |
✅ |
E116 |
— |
Cumulative ms per state; resettable. |
| EPT CEIDs |
✅ |
E116 |
S6F11 |
One CEID per state. |
4f. E120 Common Equipment Model
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Generic ObjectService (E39) |
✅ |
E39 §5 |
S14F1/F2, S14F3/F4 |
GetAttr / SetAttr against CemObjectStore; OBJTYPE validation. |
| CemObjectStore |
✅ |
E120 |
— |
Typed objects keyed by OBJSPEC + ObjType. |
4g. E148 Time Synchronization
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Time-sync drift tracking |
✅ |
E148 |
S2F31/F32 |
Drift metric maintained on every set; quality score for hosts. |
4h. E157 Module Process Tracking
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Module state machine |
✅ |
E157 §6 |
— |
NotExecuting / GeneralExecuting / StepExecuting / StepCompleted. |
| Module CEIDs |
✅ |
E157 |
S6F11 |
Generic ModuleProcessStateChange + per-state CEIDs. |
4i. E84 Parallel I/O Handoff
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Handoff state machine |
✅ |
E84 |
— |
Full LOAD / UNLOAD signal vocabulary (CS_0/CS_1, VALID, TR_REQ, BUSY, COMPT, AM_AVBL, ES). Per-port via E84PortStore keyed by port_id; independent FSMs run in parallel per load port. |
| Handshake timers TA1 / TA2 / TA3 |
✅ |
E84 §6 |
— |
E84StateMachine::set_timeouts({ta1, ta2, ta3}) + set_timer_handlers(arm, cancel). TA1 armed in ValidAsserted, TA2 in Load/UnloadReady, TA3 in Transferring; cancelled on the matching transition out. Expiry transitions to HandoffFault (latched until reset()). FSM stays I/O-free — application drives the real clock (asio::steady_timer in the reference server). |
4j. E5 §13 Wafer Maps (S12)
| Capability |
Status |
Spec ref |
Messages |
Notes |
| Map Setup Data |
✅ |
E5 §13 |
S12F1/F2, S12F3/F4 |
|
| Map Transmit Inquire / Grant |
✅ |
E5 §13 |
S12F5/F6 |
|
| Map Data Send — row format (MAPFT=0) |
✅ |
E5 §13 |
S12F7/F8 |
|
| Map Data Send — array format (MAPFT=1) |
✅ |
E5 §13 |
S12F9/F10 |
STRP + BINLT. |
| Map Data Send — coord format (MAPFT=2) |
✅ |
E5 §13 |
S12F11/F12 |
XYPOS + per-die BIN. |
| Map Data Request — row |
✅ |
E5 §13 |
S12F13/F14 |
|
| Map Data Request — array |
✅ |
E5 §13 |
S12F15/F16 |
|
| Map Data Request — coord |
✅ |
E5 §13 |
S12F17/F18 |
|
| Map Error Send |
✅ |
E5 §13 |
S12F19 |
One-way error report. |
4k. Exception Recovery (beyond E5 base alarms)
| Capability |
Status |
Spec ref |
Messages |
Notes |
| ExceptionStateMachine FSM |
✅ |
— |
— |
Per-EXID Posted / Recovering / RecoverFailed / Cleared lifecycle. Not in upstream secsgem-py. |
| Exception post / clear |
✅ |
E5 §13 |
S5F9/F10, S5F11/F12 |
|
| Exception recover request / complete |
✅ |
E5 §13 |
S5F13/F14, S5F15/F16 |
EXRECVRA validated against the posted candidates. |
| Exception recover abort |
✅ |
E5 §13 |
S5F17/F18 |
|
| AlarmSeverity bit-flag enum |
✅ |
— |
— |
Classification helpers for the ALCD lower 7 bits. |
5. Message coverage matrix
149 SECS-II messages in the catalog, spanning streams 1, 2, 3, 5, 6, 7, 9, 10, 12, 14, 16.
| Pair |
Direction |
Status |
Notes |
| S1F1 / S1F2 |
H↔E |
✅ |
round-trip + demo |
| S1F3 / S1F4 |
H→E |
✅ |
round-trip + demo |
| S1F11 / S1F12 |
H→E |
✅ |
round-trip + demo |
| S1F13 / S1F14 |
H↔E |
✅ |
round-trip + demo |
| S1F15 / S1F16 |
H→E |
✅ |
round-trip + demo |
| S1F17 / S1F18 |
H→E |
✅ |
round-trip + demo |
| S1F19 / S1F20 |
H→E |
✅ |
round-trip + demo (compliance self-report) |
| S1F21 / S1F22 |
H→E |
✅ |
round-trip + demo |
| S1F23 / S1F24 |
H→E |
✅ |
collection event namelist (CEID → VID) |
| S2F13 / S2F14 |
H→E |
✅ |
EC values |
| S2F15 / S2F16 |
H→E |
✅ |
EC set |
| S2F17 / S2F18 |
H→E |
✅ |
clock |
| S2F21 / S2F22 |
H→E |
✅ |
legacy remote command (no params) |
| S2F23 / S2F24 |
H→E |
✅ |
trace initialize |
| S2F25 / S2F26 |
H→E |
✅ |
loopback diagnostic |
| S2F29 / S2F30 |
H→E |
✅ |
EC namelist |
| S2F31 / S2F32 |
H→E |
✅ |
set time |
| S2F33 / S2F34 |
H→E |
✅ |
define report |
| S2F35 / S2F36 |
H→E |
✅ |
link event report |
| S2F37 / S2F38 |
H→E |
✅ |
enable event |
| S2F41 / S2F42 |
H→E |
✅ |
host command (modern) |
| S2F43 / S2F44 |
H→E |
✅ |
reset spooling |
| S2F45 / S2F46 |
H→E |
✅ |
define variable limits |
| S2F47 / S2F48 |
H→E |
✅ |
request limit attrs |
| S2F49 / S2F50 |
H→E |
✅ |
enhanced remote command (OBJSPEC + CPACK/CEPACK) |
| S3F17 / S3F18 |
H→E |
✅ |
E87 carrier action |
| S3F19 / S3F20 |
H→E |
✅ |
E87 slot map verify |
| S3F21 / S3F22 |
E→H |
✅ |
E87 slot map report |
| S3F23 / S3F24 |
H→E |
✅ |
E87 port group change |
| S3F25 / S3F26 |
H→E |
✅ |
E87 carrier transfer |
| S3F27 / S3F28 |
H→E |
✅ |
E87 cancel carrier |
| S5F1 / S5F2 |
E→H |
✅ |
alarm send |
| S5F3 / S5F4 |
H→E |
✅ |
enable alarm |
| S5F5 / S5F6 |
H→E |
✅ |
list alarms |
| S5F7 / S5F8 |
H→E |
✅ |
list enabled alarms |
| S5F9 / S5F10 |
E→H |
✅ |
exception post |
| S5F11 / S5F12 |
E→H |
✅ |
exception clear |
| S5F13 / S5F14 |
H→E |
✅ |
exception recover request |
| S5F15 / S5F16 |
E→H |
✅ |
exception recover complete |
| S5F17 / S5F18 |
H→E |
✅ |
exception recover abort |
| S6F1 / S6F2 |
E→H |
✅ |
trace data |
| S6F5 / S6F6 |
E→H |
✅ |
multi-block inquire / grant |
| S6F7 / S6F8 |
H→E |
✅ |
data transfer request / send |
| S6F11 / S6F12 |
E→H |
✅ |
event report (unsolicited) |
| S6F15 / S6F16 |
H→E |
✅ |
event report request (host-initiated) |
| S6F19 / S6F20 |
H→E |
✅ |
individual report request |
| S6F21 / S6F22 |
H→E |
✅ |
annotated individual report request |
| S6F23 / S6F24 |
H→E |
✅ |
request spooled data |
| S6F25 / S6F26 |
E→H |
✅ |
spool data ready (auto on re-SELECT) |
| S7F1 / S7F2 |
H→E |
✅ |
PP load inquire / grant |
| S7F3 / S7F4 |
H→E |
✅ |
PP send |
| S7F5 / S7F6 |
H→E |
✅ |
PP request |
| S7F17 / S7F18 |
H→E |
✅ |
PP delete |
| S7F19 / S7F20 |
H→E |
✅ |
PP list |
| S7F23 / S7F24 |
H→E |
✅ |
E42 formatted PP send |
| S7F25 / S7F26 |
H→E |
✅ |
E42 formatted PP request |
| S9F1, F3, F5, F7, F9, F11, F13 |
E↔H |
✅ |
protocol errors; auto-emitted on the documented conditions |
| S10F1 / S10F2 |
E→H |
✅ |
terminal request (equipment originated) |
| S10F3 / S10F4 |
H→E |
✅ |
terminal display single |
| S10F5 / S10F6 |
H→E |
✅ |
terminal display multi |
| S10F7 |
H→E |
✅ |
terminal display broadcast (W=0, no reply) |
| S12F1–F19 |
H↔E |
✅ |
wafer maps — row, array, coord; setup, request, send, error |
| S14F1 / S14F2 |
H→E |
✅ |
E39 GetAttr |
| S14F3 / S14F4 |
H→E |
✅ |
E39 SetAttr |
| S14F9 / S14F10 |
H→E |
✅ |
E94 CJ create |
| S14F11 / S14F12 |
H→E |
✅ |
E94 CJ delete |
| S16F5 / S16F6 |
H→E |
✅ |
E40 PRJobCommand |
| S16F7 / S16F8 |
H→E |
✅ |
E40 PRJobMonitor |
| S16F9 |
E→H |
✅ |
E40 PRJobAlert (auto on transition) |
| S16F11 / S16F12 |
H→E |
✅ |
E40 PRJobCreate (full body) |
| S16F13 / S16F14 |
H→E |
✅ |
E40 PRJobDequeue |
| S16F15 / S16F16 |
H→E |
✅ |
E40 PRJobCreateMultiple |
| S16F27 / S16F28 |
H→E |
✅ |
E94 CJobCommand |
6. Demo evidence
The two-container demo (docker compose up --no-deps server client)
walks ~20 SECS transactions end-to-end:
- TCP connect →
Select.req → Select.rsp(Ok) → SELECTED on both sides.
S1F13/S1F14 Establish Comms.
S1F17/S1F18 Request Online; control state transitions
HostOffline → AttemptOnline → OnlineRemote.
S1F19/S1F20 host fetches the equipment's GEM-compliance self-report.
S1F21/S1F22 DVID namelist.
S1F11/S1F12 SVID namelist → S1F3/S1F4 values read.
S2F29/S2F30 EC namelist → S2F13/S2F14 EC read.
S2F17/S2F18 clock read.
S2F33/S2F34 Define Report 1000 over the 3 SVIDs.
S2F35/S2F36 Link CEIDs 200 and 300 to Report 1000.
S2F37/S2F38 Enable CEIDs 200, 300.
S2F41/S2F42 host command START → server emits
S6F11(CEID=300) carrying the linked Report 1000 → host acks S6F12.
S5F5/S5F6 list alarm directory.
S5F3/S5F4 enable alarm 1.
S2F41/S2F42 host command FAULT → server emits
S5F1 (ALCD=0x84) + S6F11(CEID=200).
- Spool window:
SPOOL_ON → START (emission goes to spool) →
SPOOL_OFF → S6F23(Transmit) → server drains queued S6F11 to host.
S7F19/S7F20 recipe list, S7F5/S7F6 fetch RECIPE-A.
S16F11/S16F12 create Process Job PJ-1 with PPID RECIPE-A.
S14F9/S14F10 create Control Job CJ-1 containing [PJ-1].
S16F27/S16F28 CJSTART → equipment cascades CJ Queued → Executing
and the contained PJ through SettingUp → WaitingForStart →
Processing → ProcessComplete, emitting one S16F9 PRJobAlert per PJ
transition and S6F11(CEID=400) / S6F11(CEID=401) for CJ Executing
/ Completed.
S14F11/S14F12 delete CJ-1.
S10F1/S10F2 host → equipment terminal display.
S1F15/S1F16 Request Offline.
Separate.req → clean close on both sides.
Unit tests: 291 cases / 1515 assertions pass (docker compose run --rm tests).
The suite includes integration tests that drive a real hsms::Connection
over a loopback socket pair to verify the E37 §7.2 / §7.4 / §7.7
edge cases — not just the happy path.
The E30 §6.5 Communication state machine is unit-tested independently of
the transport (timer firings simulated via test callbacks).
Live conformance harness: build/secs_conformance --host <ip> --port <p>
walks 47 host-driven checks against a passive equipment, covering every
E30 fundamental + additional capability that COMPLIANCE.md ✅ — establish
comms, identification, status/DVID/CEID/EC namelists + values, dynamic
event reports (define/link/enable + S6F15/F19/F21 readbacks), unsolicited
S6F11 observation after RCMD, all three remote-command forms
(S2F41/F21/F49), trace init, limits, spool reset + transmit, alarms
(list/list-enabled/enable), exception recover/abort (S5F13/F17), PP
load-inquire/list/request, both terminal-display directions
(S10F3/F5), E40 PJ create/monitor/command/dequeue, E94 CJ
create/command/delete, E87 carrier action/slot-map/transfer/cancel,
and E39 GetAttr. Exits 0 with PASS/FAIL summary; intended to be run
against vendor equipment as the first-line conformance probe.
7. Interoperability with secsgem-py 0.3.0
The interop/ harness (see interop/README.md) cross-validates the
codebase against the reference Python implementation in Docker:
- secsgem-py active host → C++ passive server: 24 named checks
across S1/S2/S5/S6/S7/S10 plus unsolicited S5F1/S6F11. Three
consecutive clean runs.
- C++ active host → secsgem-py passive equipment: HSMS select +
S1F13 + S1F1 + S1F3 + clean separate; exits 0.
- C++ active host → raw GEM 300 streams (
raw_gem300_harness.py):
S3 (E87), S14 (E94), S16 (E40), S12 (wafer maps) round-tripped
through secsgem-py's raw HSMS layer with hand-crafted bodies because
secsgem-py's high-level API doesn't expose these streams.
Bugs surfaced by the interop sweep (now fixed): strict per-width
parsing rejected U1-encoded identifiers (SEMI E5 allows
U1|U2|U4|U8); PPBODY-as-ASCII was rejected; S1F23/F24 wasn't
implemented; S10F3 (host→equipment Terminal Display Single) wasn't
wired (we had S10F1 in the wrong direction).
8. Explicitly out of scope (with reasons)
These look like gaps but are deliberate. None blocks the GEM
compliance claim.
| Item |
Why it's out of scope |
| Multi-block SECS-I transfers |
Multi-block is a SECS-I concept for 244-byte serial frames. HSMS allows arbitrarily large bodies (up to the codebase's 16 MiB cap), so multi-block is structurally not needed. E37-based GEM equipment does not require it. |
| HSMS-GS (multi-session) |
Out of scope — modern HSMS-SS covers virtually all current GEM equipment. |
| Equipment Processing States (concrete states) |
E30 §6.3 says the specific states are tool-defined. We provide the engine (ControlTransitionTable + the YAML loader); equipment vendors load their concrete states (IDLE / SETUP / READY / EXECUTING / PAUSE / …) the same way data/control_state.yaml is loaded today. Spec-compliant either way. |
9. What "100% GEM-compliant" honestly means here
Every GEM Fundamental and every GEM Additional capability that the E30
specification defines with a concrete SECS-II message set is implemented,
round-trip-tested, demonstrated in the two-container demo, AND
cross-validated against secsgem-py 0.3.0 on the overlap. Every GEM 300
standard in scope (E40, E87, E90, E94, E116, E120, E148, E157, E84) is
implemented end-to-end with its state machine, store, wire messages,
dispatch, and tests. Persistent spool, exception recovery (S5F13–F18 +
ExceptionStateMachine), and the SML parser are all upstream-absent in
secsgem-py.
What this codebase does not demonstrate, and what a real
"GEM-compliant" marketing claim would still need:
- Conformance against a GEM Reference Test System (RTS) or
equivalent third-party validator, on a representative tool. The
codebase provides the message catalog + the runtime; running an
external validator against a real physical or simulated tool is
how compliance gets certified.
- Per-vendor application code that connects the generic stores to
the equipment's real sensors, recipe engine, alarm sources, and
processing state model. The codebase provides the data model and
the dispatcher; the application is what makes a specific tool
GEM-compliant.
In short: this is a GEM-conformant runtime stack with the full GEM
300 suite, not a GEM-conformant tool. Pointing the runtime at a
real piece of equipment, populating the YAML files with the tool's
real SVIDs / ECIDs / alarms / capabilities / job behaviour, and wiring
the application callbacks completes the picture.