A fictional Physical Vapor Deposition tool wired end-to-end.
examples/pvd_tool/ is the template a real customer should fork.
Files:
- equipment.yaml: 32 SVIDs (chamber pressure, temperature, source
power, gas flows, cooling water, wafer counters, recipe step
state, EPT name, 4 load ports), 5 DVIDs, 7 ECIDs (setpoints
+ T_CRA/T_DELAY + cleaning interval + retry count), 17 CEIDs
(control state, alarms, process lifecycle, material movement,
EPT), 12 alarms with realistic categories (safety, error,
warning, attention), 3 multi-step recipes (Al / Ti / Cu),
9 host commands.
- main.cpp (~860 lines): the vendor-side application:
§1 helpers + constants
§2 sensor simulator — 4 sensors at 10 Hz + 1 Hz cadences,
random-walk around step-targeted setpoints, asio::post-on-strand
thread-safety pattern
§3 recipe runner — parses recipe body (STEP NAME duration=120s
power=2500W gas=Argon flow=50sccm), walks each step at 1s
per declared-second, fires step-started/completed CEIDs,
drives PJ FSM through ProcessComplete
§4 alarm threshold monitor — chamber-pressure-over-setpoint and
cleaning-interval logic, continuous evaluation, set/clear
emission gated on alarm-enable
§5 EPT cycler — Standby ↔ Productive ↔ UnscheduledDowntime
based on PJ activity + safety alarms
§6 Prometheus exporter on :9090 (pvd_messages_total,
pvd_chamber_pressure_torr, pvd_spool_depth, pvd_events_total,
pvd_alarm_set_total)
§7 Router handlers — full E30 set (~40 handlers) so a host can
do real work
§8 main() — YAML validation, model construction, server wiring,
periodic gauge updates
- README.md: section-by-section walkthrough, what's the same as
apps/secs_server.cpp, what this adds (simulator + recipe runner
+ alarm monitor + EPT cycler + metrics), what's not here
(persistence + E84 + real I/O), and what to change for your tool.
Verification: 47/47 conformance harness checks PASS against the
PVD tool — same as the demo server.
CMakeLists.txt adds the pvd_tool target.
README's documentation map points at examples/pvd_tool/.
Co-Authored-By: Claude Opus 4.7 <noreply@anthropic.com>
raphael
6aa4427186