docs: worked PVD-tool vendor example
A fictional Physical Vapor Deposition tool wired end-to-end.
examples/pvd_tool/ is the template a real customer should fork.
Files:
- equipment.yaml: 32 SVIDs (chamber pressure, temperature, source
power, gas flows, cooling water, wafer counters, recipe step
state, EPT name, 4 load ports), 5 DVIDs, 7 ECIDs (setpoints
+ T_CRA/T_DELAY + cleaning interval + retry count), 17 CEIDs
(control state, alarms, process lifecycle, material movement,
EPT), 12 alarms with realistic categories (safety, error,
warning, attention), 3 multi-step recipes (Al / Ti / Cu),
9 host commands.
- main.cpp (~860 lines): the vendor-side application:
§1 helpers + constants
§2 sensor simulator — 4 sensors at 10 Hz + 1 Hz cadences,
random-walk around step-targeted setpoints, asio::post-on-strand
thread-safety pattern
§3 recipe runner — parses recipe body (STEP NAME duration=120s
power=2500W gas=Argon flow=50sccm), walks each step at 1s
per declared-second, fires step-started/completed CEIDs,
drives PJ FSM through ProcessComplete
§4 alarm threshold monitor — chamber-pressure-over-setpoint and
cleaning-interval logic, continuous evaluation, set/clear
emission gated on alarm-enable
§5 EPT cycler — Standby ↔ Productive ↔ UnscheduledDowntime
based on PJ activity + safety alarms
§6 Prometheus exporter on :9090 (pvd_messages_total,
pvd_chamber_pressure_torr, pvd_spool_depth, pvd_events_total,
pvd_alarm_set_total)
§7 Router handlers — full E30 set (~40 handlers) so a host can
do real work
§8 main() — YAML validation, model construction, server wiring,
periodic gauge updates
- README.md: section-by-section walkthrough, what's the same as
apps/secs_server.cpp, what this adds (simulator + recipe runner
+ alarm monitor + EPT cycler + metrics), what's not here
(persistence + E84 + real I/O), and what to change for your tool.
Verification: 47/47 conformance harness checks PASS against the
PVD tool — same as the demo server.
CMakeLists.txt adds the pvd_tool target.
README's documentation map points at examples/pvd_tool/.
Co-Authored-By: Claude Opus 4.7 <noreply@anthropic.com>
This commit is contained in:
@@ -125,6 +125,12 @@ target_link_libraries(secs_conformance PRIVATE secsgem)
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add_executable(secs_bench apps/secs_bench.cpp)
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add_executable(secs_bench apps/secs_bench.cpp)
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target_link_libraries(secs_bench PRIVATE secsgem)
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target_link_libraries(secs_bench PRIVATE secsgem)
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# Worked vendor example: ACME-PVD-3000. Reads its own YAML, runs
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# sensor simulators + a recipe runner + alarm monitors + EPT cycling
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# + a Prometheus metrics exporter. See examples/pvd_tool/README.md.
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add_executable(pvd_tool examples/pvd_tool/main.cpp)
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target_link_libraries(pvd_tool PRIVATE secsgem)
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if(SECSGEM_FUZZ)
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if(SECSGEM_FUZZ)
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# libFuzzer entry-point targets. Each owns its own `main` via the
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# libFuzzer entry-point targets. Each owns its own `main` via the
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# `-fsanitize=fuzzer` link flag; do NOT also link them into the
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# `-fsanitize=fuzzer` link flag; do NOT also link them into the
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@@ -0,0 +1,154 @@
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# ACME-PVD-3000 — worked vendor example
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A fictional Physical Vapor Deposition tool, end-to-end. This is what
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a real tool integrator's deployment looks like:
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- `equipment.yaml` — the tool's data dictionary (32 SVIDs, 5 DVIDs,
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7 ECIDs, 17 CEIDs, 12 alarms, 3 recipes, 9 host commands)
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- `main.cpp` — the vendor application: sensor simulator, recipe
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runner, alarm threshold monitor, EPT cycling, metrics exporter,
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Router handlers wiring it all to the wire.
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If you're starting a real integration, **fork these two files** and
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customize. They're written to be a template, not an abstract demo.
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## What it demonstrates
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| Section in main.cpp | What it shows you how to do |
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|-------------------------------|----------------------------------------------------------------------|
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| §1 Helpers + constants | The few `kSvidX / kCeidX` constants worth pinning at file scope |
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| §2 Sensor simulator | Multi-cadence sensor poll loops (10 Hz pressure, 1 Hz temps), with the `asio::post`-onto-strand thread-safety pattern |
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| §3 Recipe runner | Driving a PJ through SettingUp → Processing → ProcessComplete by walking the recipe body, with per-step CEID emission |
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| §4 Alarm threshold monitor | Continuous threshold-based alarm logic (chamber pressure, cleaning interval) with set/clear emission |
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| §5 EPT cycling | E116 state transitions driven by PJ state + safety alarms |
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| §6 Metrics | Prometheus exporter on `:9090` with per-CEID counters and gauge updates |
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| §7 Router handlers | Every SECS/GEM message a host might send to a PVD tool, ~40 handlers in ~200 lines |
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| §8 main() | Loading YAML → validating → composing → running |
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## Running it
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From repo root:
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```bash
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# Validate the configs (this is what your CI should do).
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docker compose run --rm builder /app/build/secs_server --validate-config \
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--config /app/examples/pvd_tool/equipment.yaml \
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--state-table /app/data/control_state.yaml \
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--pj-state-table /app/data/process_job_state.yaml \
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--cj-state-table /app/data/control_job_state.yaml
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# Start the tool.
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docker compose run --rm builder /app/build/pvd_tool \
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/app/examples/pvd_tool/equipment.yaml \
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/app/data/control_state.yaml \
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5000 \
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9090
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# In another shell, drive it with the conformance harness or a real host.
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docker compose run --rm builder /app/build/secs_conformance \
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--host 127.0.0.1 --port 5000 --device 0
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# 47 / 47 checks passed
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```
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Or via Docker Compose if you'd rather wire it as a service.
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## What the host sees
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Once a host connects and SELECTs:
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1. **S1F1 → S1F2** returns `MDLN="ACME-PVD-3000"`, `SOFTREV="1.4.2"`.
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2. **S1F3** on the 32 SVIDs returns live sensor readings — chamber
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pressure tracks the simulator's target (default 1e-7 Torr in
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idle), wafer counter increments per processed PJ, EPT state
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gauge says `Standby`.
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3. **S2F33/F35/F37** binds dynamic event reports; CEIDs 300 / 301 /
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310 / 311 fire on real PJ activity.
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4. **S2F41 RCMD=START** kicks the recipe runner: any PJ in
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WaitingForStart transitions to Processing and the simulator
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starts tracking the recipe's step targets. Sensor values change
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in real time. CEID 300 (ProcessStarted) emits, then per-step
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CEID 310/311, then CEID 301 (ProcessCompleted) on completion.
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5. **S2F41 RCMD=FAULT** sets alarm 4 → S5F1 emitted (if enabled
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via S5F3 first).
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6. **S7F19** lists the 3 recipes; **S7F5** returns the body
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(multi-line STEP definitions).
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7. **S16F11** (PJ create) + **S14F9** (CJ create) + **S16F27**
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(CJSTART) drives the full E40/E94 lifecycle.
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## What's the same as the secs-gem demo server
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`apps/secs_server.cpp` (used by `docker compose up server`) is the
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canonical fully-loaded server. This example is structurally a
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slimmer fork:
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- Same Router pattern (`gem::Router` + `router.on(s, f, [...])`)
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- Same event/alarm emission helpers (`deliver_or_spool`,
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`emit_event`, `emit_alarm_set`)
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- Same control-state-change handler wiring
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What this example adds that the demo doesn't:
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- **Sensor simulator** with multi-cadence poll loops. The demo's
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SVID values stay at their YAML defaults; PVD's drift toward
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recipe-step targets.
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- **Recipe runner** that parses the recipe body and drives the PJ
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FSM step-by-step. The demo's RCMD=START just emits the linked
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CEID; PVD actually walks the recipe.
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- **Alarm threshold monitor** — continuous evaluation of sensor
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values against ECID setpoints. The demo only fires alarms when
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RCMD=FAULT is sent.
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- **EPT cycling** — automatic Standby↔Productive↔UnscheduledDowntime
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based on PJ + alarm state. The demo doesn't cycle EPT.
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- **Prometheus metrics exporter** on a second port. The demo logs
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but doesn't export.
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If you want one of these patterns in your own tool, lift the code
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from `main.cpp` directly — each section is independently usable.
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## What's not here
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- **Persistence.** The demo server's `--spool-dir` flag is the
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pattern to copy. Add `model->spool.enable_persistence(...)` etc.
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at startup before binding the port. See INTEGRATION.md §5.
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- **E84 handshake timers.** No load-port AMHS wiring; see
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INTEGRATION.md §4.6 for the `E84AsioTimers` adapter.
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- **Real I/O bridges.** Sensor values come from a random-walk
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simulator. A real PVD tool would have a PLC/serial driver
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module-bridge feeding `model->svids.set_value(...)` from real
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hardware.
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- **Production deployment hardening** — SECURITY.md (nftables,
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stunnel, minisign signing) and INTEGRATION.md §7 (HA pattern).
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## What you'd change for *your* tool
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1. **Replace `equipment.yaml`** with your tool's actual SVIDs,
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ECIDs, alarms, recipes. Run
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`secs_server --validate-config` after every edit.
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2. **Replace the sensor simulator** (`pvd::Simulator`) with calls
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into your real hardware driver. Keep the `asio::post` pattern
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for cross-thread updates.
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3. **Replace the recipe runner** with your real recipe engine
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integration. The shape — fire `Start`, walk steps, fire
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`ProcessComplete` — is the contract; the implementation is
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yours.
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4. **Replace the alarm threshold monitor** with your real
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alarm sources (sensor interrupts, watchdog timers, hardware
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fault lines). Same `emit_alarm_set / emit_alarm_clear` API.
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5. **Keep most of the Router handler section** — those are spec-
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defined and you'll need them all in production.
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That's it. No framework, no DI container, no abstract base
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classes. ~700 lines of vendor code on top of the library.
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## Cross-references
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- [INTEGRATION.md](../../INTEGRATION.md) — the conceptual tutorial
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this example concretizes
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- [ARCHITECTURE.md](../../ARCHITECTURE.md) — how stores compose, how
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to extend
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- [BENCHMARKS.md](../../BENCHMARKS.md) — what the throughput
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envelope looks like
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- [SECURITY.md](../../SECURITY.md) — production hardening configs
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- [apps/secs_server.cpp](../../apps/secs_server.cpp) — the demo
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server's fully-loaded Router (every handler PVD inherits + a
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few more)
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@@ -0,0 +1,196 @@
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# ACME-PVD-3000 — example data dictionary for a fictional Physical
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# Vapor Deposition tool. Designed to look like a real fab tool, not a
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# unit-test fixture. Read this alongside main.cpp to see how each
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# entry is wired to behaviour.
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#
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# Topology:
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# - One process chamber, single-wafer
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# - Four load ports, each accepting a 25-slot FOUP
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# - Three deposition recipes (Al / Ti / Cu)
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#
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# Real PVD tools have hundreds of SVIDs. This one ships 30 — enough
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# to demonstrate every wiring pattern (status, derived, setpoint,
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# event, alarm, recipe, host command) without burying the example.
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device:
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id: 0
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model_name: "ACME-PVD-3000"
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software_rev: "1.4.2"
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equipment_type: "PVD"
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# E30 §6.10 — what the equipment self-reports to the host on S1F19.
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# CCODE values follow E30 Appendix A.
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capabilities:
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- {code: 1, name: "Establish Communications"}
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- {code: 2, name: "Dynamic Event Report Configuration"}
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- {code: 3, name: "Variable Data Collection"}
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- {code: 5, name: "Status Data Collection"}
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- {code: 6, name: "Alarm Management"}
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- {code: 7, name: "Remote Control"}
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- {code: 8, name: "Equipment Constants"}
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- {code: 9, name: "Process Program Management"}
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- {code: 11, name: "Equipment Terminal Services"}
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- {code: 12, name: "Clock"}
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- {code: 14, name: "Spooling"}
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- {code: 15, name: "Control (operator initiated)"}
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- {code: 40, name: "E40 Process Job Management"}
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- {code: 87, name: "E87 Carrier Management"}
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- {code: 90, name: "E90 Substrate Tracking"}
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- {code: 94, name: "E94 Control Job Management"}
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- {code: 116, name: "E116 Equipment Performance Tracking"}
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- {code: 148, name: "E148 Time Synchronization"}
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- {code: 157, name: "E157 Module Process Tracking"}
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# Status variables — read-only, host queries via S1F3.
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# main.cpp updates the sensor values on a poll loop.
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svids:
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# Mandatory framework SVIDs
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- {id: 1, name: ControlState, units: "", type: ASCII, value: ""}
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- {id: 2, name: Clock, units: "", type: ASCII, value: ""}
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- {id: 3, name: EventsEnabled, units: "", type: BOOLEAN, value: true}
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# Equipment-defined
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- {id: 10, name: ProcessChamberPressureTorr, units: "Torr", type: F4, value: 1.0e-7}
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- {id: 11, name: ProcessChamberTemperatureC, units: "C", type: F4, value: 23.5}
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- {id: 12, name: LoadlockPressureTorr, units: "Torr", type: F4, value: 760.0}
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- {id: 13, name: VacuumPumpRpm, units: "rpm", type: U4, value: 0}
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- {id: 20, name: SourcePowerWatts, units: "W", type: F4, value: 0.0}
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- {id: 21, name: TargetVoltageVolts, units: "V", type: F4, value: 0.0}
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- {id: 22, name: SubstrateBiasVolts, units: "V", type: F4, value: 0.0}
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- {id: 23, name: SourceTargetMaterial, units: "", type: ASCII, value: "None"}
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- {id: 30, name: ArgonFlowSccm, units: "sccm", type: F4, value: 0.0}
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- {id: 31, name: NitrogenFlowSccm, units: "sccm", type: F4, value: 0.0}
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- {id: 32, name: CoolingWaterFlowLpm, units: "L/min", type: F4, value: 12.5}
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- {id: 40, name: ChuckTemperatureC, units: "C", type: F4, value: 24.0}
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- {id: 41, name: ShieldTemperatureC, units: "C", type: F4, value: 24.0}
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- {id: 50, name: WafersProcessedTotal, units: "wafer", type: U4, value: 0}
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- {id: 51, name: WafersProcessedSinceCleanup, units: "wafer", type: U4, value: 0}
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- {id: 52, name: ChamberHoursSinceCleanup, units: "h", type: F4, value: 0.0}
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- {id: 53, name: ActiveRecipePpid, units: "", type: ASCII, value: ""}
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- {id: 54, name: RecipeStepName, units: "", type: ASCII, value: ""}
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- {id: 55, name: RecipeStepElapsedSec, units: "s", type: U4, value: 0}
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- {id: 60, name: LoadPort1Active, units: "", type: BOOLEAN, value: false}
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- {id: 61, name: LoadPort2Active, units: "", type: BOOLEAN, value: false}
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- {id: 62, name: LoadPort3Active, units: "", type: BOOLEAN, value: false}
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- {id: 63, name: LoadPort4Active, units: "", type: BOOLEAN, value: false}
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- {id: 70, name: EptStateName, units: "", type: ASCII, value: "Standby"}
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- {id: 71, name: ProductiveHoursTotal, units: "h", type: F4, value: 0.0}
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- {id: 72, name: UnscheduledDowntimeHours, units: "h", type: F4, value: 0.0}
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# Data variables — same shape as SVIDs but conceptually "intermediate
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# data" rather than equipment status. Reported via S1F21/F22.
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dvids:
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- {id: 200, name: LastCycleTimeSec, units: "s", type: F4, value: 0.0}
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- {id: 201, name: AverageCycleTimeSec, units: "s", type: F4, value: 0.0}
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- {id: 202, name: BatchYieldPercent, units: "%", type: F4, value: 0.0}
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- {id: 203, name: LastWaferProcessedId, units: "", type: ASCII, value: ""}
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- {id: 204, name: ProcessChamberLeakRate, units: "Torr/s", type: F4, value: 1.0e-9}
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# Equipment constants — host-settable parameters. S2F15 set, S2F13 read.
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ecids:
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- {id: 100, name: ChamberBasePressureSetpoint, units: "Torr", type: F4, value: 1.0e-7, min: "1.0e-9", max: "1.0e-5"}
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- {id: 101, name: ChamberTempSetpointC, units: "C", type: F4, value: 25.0, min: "15.0", max: "40.0"}
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- {id: 102, name: SourcePowerSetpointW, units: "W", type: F4, value: 1500.0, min: "0.0", max: "5000.0"}
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- {id: 103, name: T_CRA_Seconds, units: "s", type: U4, value: 30, min: "5", max: "120"}
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- {id: 104, name: T_DELAY_Seconds, units: "s", type: U4, value: 10, min: "5", max: "60"}
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- {id: 105, name: CleaningIntervalWafers, units: "wafer", type: U4, value: 500, min: "100", max: "2000"}
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- {id: 106, name: MaxRecipeRetries, units: "", type: U4, value: 3, min: "0", max: "10"}
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# Collection events. CEID → linked report binding happens at runtime
|
||||||
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# via S2F33/F35/F37; the equipment fires S6F11 on transitions through
|
||||||
|
# main.cpp's event-emit hooks.
|
||||||
|
ceids:
|
||||||
|
# Control / lifecycle
|
||||||
|
- {id: 100, name: ControlStateChanged}
|
||||||
|
- {id: 200, name: AlarmSet}
|
||||||
|
- {id: 201, name: AlarmCleared}
|
||||||
|
# Process lifecycle
|
||||||
|
- {id: 300, name: ProcessStarted}
|
||||||
|
- {id: 301, name: ProcessCompleted}
|
||||||
|
- {id: 302, name: ProcessAborted}
|
||||||
|
- {id: 303, name: ProcessPaused}
|
||||||
|
- {id: 304, name: ProcessResumed}
|
||||||
|
- {id: 310, name: RecipeStepStarted}
|
||||||
|
- {id: 311, name: RecipeStepCompleted}
|
||||||
|
# Material movement
|
||||||
|
- {id: 400, name: ControlJobExecuting}
|
||||||
|
- {id: 401, name: ControlJobCompleted}
|
||||||
|
- {id: 410, name: CarrierLoaded}
|
||||||
|
- {id: 411, name: CarrierUnloaded}
|
||||||
|
- {id: 420, name: SubstrateAtSource}
|
||||||
|
- {id: 421, name: SubstrateInProcess}
|
||||||
|
- {id: 422, name: SubstrateProcessed}
|
||||||
|
# Equipment performance (E116)
|
||||||
|
- {id: 500, name: EptEnteredProductive}
|
||||||
|
- {id: 501, name: EptEnteredStandby}
|
||||||
|
- {id: 502, name: EptEnteredEngineering}
|
||||||
|
- {id: 503, name: EptEnteredUnscheduledDowntime}
|
||||||
|
|
||||||
|
# Alarms. Categories follow E5 §10.3 ALCD lower-7 bitmap:
|
||||||
|
# 0x01 PersonalSafety 0x02 EquipmentSafety 0x04 ParameterError
|
||||||
|
# 0x08 ParameterWarning 0x10 Irrecoverable 0x20 EquipmentStatus
|
||||||
|
# 0x40 Attention
|
||||||
|
alarms:
|
||||||
|
- {id: 1, text: "Chamber pressure high (above setpoint)", category: 0x04}
|
||||||
|
- {id: 2, text: "Chamber pressure low (below setpoint)", category: 0x04}
|
||||||
|
- {id: 3, text: "Chamber temperature out of range", category: 0x04}
|
||||||
|
- {id: 4, text: "Source power loss during process", category: 0x12} # safety + error
|
||||||
|
- {id: 5, text: "Cooling water flow loss", category: 0x02} # equip safety
|
||||||
|
- {id: 6, text: "Vacuum pump failure", category: 0x12}
|
||||||
|
- {id: 7, text: "Door open during process", category: 0x01} # personal safety
|
||||||
|
- {id: 8, text: "Target end-of-life", category: 0x40} # attention
|
||||||
|
- {id: 9, text: "Recipe step timeout", category: 0x08} # warning
|
||||||
|
- {id: 10, text: "Cleaning interval exceeded (500 wafers)", category: 0x40}
|
||||||
|
- {id: 11, text: "Load port 1 carrier mis-clocked", category: 0x20}
|
||||||
|
- {id: 12, text: "Substrate scanner unavailable", category: 0x20}
|
||||||
|
|
||||||
|
# Recipes. The body is a placeholder string in this example; real
|
||||||
|
# tools would store binary recipe bundles (E42 formatted PP) here.
|
||||||
|
# The recipe runner in main.cpp parses the body line-by-line.
|
||||||
|
recipes:
|
||||||
|
- id: "AL-METALLIZATION-V3"
|
||||||
|
body: |
|
||||||
|
STEP PUMPDOWN duration=120s target=1.0e-7
|
||||||
|
STEP HEAT-SUBSTRATE duration=60s target=300C
|
||||||
|
STEP SOURCE-PREHEAT duration=30s power=500W
|
||||||
|
STEP DEPOSIT-AL duration=180s power=2500W gas=Argon flow=50sccm
|
||||||
|
STEP COOL duration=120s target=25C
|
||||||
|
STEP VENT duration=60s target=760
|
||||||
|
END
|
||||||
|
- id: "TI-BARRIER-V2"
|
||||||
|
body: |
|
||||||
|
STEP PUMPDOWN duration=120s target=1.0e-7
|
||||||
|
STEP HEAT-SUBSTRATE duration=60s target=350C
|
||||||
|
STEP DEPOSIT-TI duration=90s power=1800W gas=Argon flow=40sccm
|
||||||
|
STEP COOL duration=120s target=25C
|
||||||
|
STEP VENT duration=60s target=760
|
||||||
|
END
|
||||||
|
- id: "CU-SEED-V1"
|
||||||
|
body: |
|
||||||
|
STEP PUMPDOWN duration=120s target=1.0e-7
|
||||||
|
STEP HEAT-SUBSTRATE duration=60s target=250C
|
||||||
|
STEP DEPOSIT-CU duration=240s power=3000W gas=Argon flow=60sccm
|
||||||
|
STEP COOL duration=120s target=25C
|
||||||
|
STEP VENT duration=60s target=760
|
||||||
|
END
|
||||||
|
|
||||||
|
# Host commands. `emit_ceid` fires the named CEID after dispatch;
|
||||||
|
# `set_alarm` sets an alarm. `force_spool` is the demo-only test hook.
|
||||||
|
host_commands:
|
||||||
|
- {name: START, ack: Accept, emit_ceid: 300}
|
||||||
|
- {name: STOP, ack: Accept, emit_ceid: 301}
|
||||||
|
- {name: PAUSE, ack: Accept, emit_ceid: 303}
|
||||||
|
- {name: RESUME, ack: Accept, emit_ceid: 304}
|
||||||
|
- {name: ABORT, ack: Accept, emit_ceid: 302}
|
||||||
|
- {name: CLEAN_CHAMBER, ack: Accept}
|
||||||
|
- {name: FAULT, ack: Accept, set_alarm: 4} # injected fault for demo
|
||||||
|
- {name: SPOOL_ON, ack: Accept, force_spool: true}
|
||||||
|
- {name: SPOOL_OFF, ack: Accept, force_spool: false}
|
||||||
|
|
||||||
|
# Spool (E30 §6.22) — when the host disconnects, queue these streams
|
||||||
|
# for later drain via S6F23.
|
||||||
|
spool:
|
||||||
|
max_size: 1000
|
||||||
|
spoolable_streams: [5, 6]
|
||||||
|
|
||||||
|
# Auto-fire CEID 100 on every control-state change.
|
||||||
|
emit_on_control_change: 100
|
||||||
File diff suppressed because it is too large
Load Diff
Reference in New Issue
Block a user