docs: worked PVD-tool vendor example
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A fictional Physical Vapor Deposition tool wired end-to-end.
examples/pvd_tool/ is the template a real customer should fork.

Files:
- equipment.yaml: 32 SVIDs (chamber pressure, temperature, source
  power, gas flows, cooling water, wafer counters, recipe step
  state, EPT name, 4 load ports), 5 DVIDs, 7 ECIDs (setpoints
  + T_CRA/T_DELAY + cleaning interval + retry count), 17 CEIDs
  (control state, alarms, process lifecycle, material movement,
  EPT), 12 alarms with realistic categories (safety, error,
  warning, attention), 3 multi-step recipes (Al / Ti / Cu),
  9 host commands.

- main.cpp (~860 lines): the vendor-side application:
  §1 helpers + constants
  §2 sensor simulator — 4 sensors at 10 Hz + 1 Hz cadences,
     random-walk around step-targeted setpoints, asio::post-on-strand
     thread-safety pattern
  §3 recipe runner — parses recipe body (STEP NAME duration=120s
     power=2500W gas=Argon flow=50sccm), walks each step at 1s
     per declared-second, fires step-started/completed CEIDs,
     drives PJ FSM through ProcessComplete
  §4 alarm threshold monitor — chamber-pressure-over-setpoint and
     cleaning-interval logic, continuous evaluation, set/clear
     emission gated on alarm-enable
  §5 EPT cycler — Standby ↔ Productive ↔ UnscheduledDowntime
     based on PJ activity + safety alarms
  §6 Prometheus exporter on :9090 (pvd_messages_total,
     pvd_chamber_pressure_torr, pvd_spool_depth, pvd_events_total,
     pvd_alarm_set_total)
  §7 Router handlers — full E30 set (~40 handlers) so a host can
     do real work
  §8 main() — YAML validation, model construction, server wiring,
     periodic gauge updates

- README.md: section-by-section walkthrough, what's the same as
  apps/secs_server.cpp, what this adds (simulator + recipe runner
  + alarm monitor + EPT cycler + metrics), what's not here
  (persistence + E84 + real I/O), and what to change for your tool.

Verification: 47/47 conformance harness checks PASS against the
PVD tool — same as the demo server.

CMakeLists.txt adds the pvd_tool target.

README's documentation map points at examples/pvd_tool/.

Co-Authored-By: Claude Opus 4.7 <noreply@anthropic.com>
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add_executable(secs_bench apps/secs_bench.cpp)
target_link_libraries(secs_bench PRIVATE secsgem)
# Worked vendor example: ACME-PVD-3000. Reads its own YAML, runs
# sensor simulators + a recipe runner + alarm monitors + EPT cycling
# + a Prometheus metrics exporter. See examples/pvd_tool/README.md.
add_executable(pvd_tool examples/pvd_tool/main.cpp)
target_link_libraries(pvd_tool PRIVATE secsgem)
if(SECSGEM_FUZZ)
# libFuzzer entry-point targets. Each owns its own `main` via the
# `-fsanitize=fuzzer` link flag; do NOT also link them into the
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# ACME-PVD-3000 — worked vendor example
A fictional Physical Vapor Deposition tool, end-to-end. This is what
a real tool integrator's deployment looks like:
- `equipment.yaml` — the tool's data dictionary (32 SVIDs, 5 DVIDs,
7 ECIDs, 17 CEIDs, 12 alarms, 3 recipes, 9 host commands)
- `main.cpp` — the vendor application: sensor simulator, recipe
runner, alarm threshold monitor, EPT cycling, metrics exporter,
Router handlers wiring it all to the wire.
If you're starting a real integration, **fork these two files** and
customize. They're written to be a template, not an abstract demo.
## What it demonstrates
| Section in main.cpp | What it shows you how to do |
|-------------------------------|----------------------------------------------------------------------|
| §1 Helpers + constants | The few `kSvidX / kCeidX` constants worth pinning at file scope |
| §2 Sensor simulator | Multi-cadence sensor poll loops (10 Hz pressure, 1 Hz temps), with the `asio::post`-onto-strand thread-safety pattern |
| §3 Recipe runner | Driving a PJ through SettingUp → Processing → ProcessComplete by walking the recipe body, with per-step CEID emission |
| §4 Alarm threshold monitor | Continuous threshold-based alarm logic (chamber pressure, cleaning interval) with set/clear emission |
| §5 EPT cycling | E116 state transitions driven by PJ state + safety alarms |
| §6 Metrics | Prometheus exporter on `:9090` with per-CEID counters and gauge updates |
| §7 Router handlers | Every SECS/GEM message a host might send to a PVD tool, ~40 handlers in ~200 lines |
| §8 main() | Loading YAML → validating → composing → running |
## Running it
From repo root:
```bash
# Validate the configs (this is what your CI should do).
docker compose run --rm builder /app/build/secs_server --validate-config \
--config /app/examples/pvd_tool/equipment.yaml \
--state-table /app/data/control_state.yaml \
--pj-state-table /app/data/process_job_state.yaml \
--cj-state-table /app/data/control_job_state.yaml
# Start the tool.
docker compose run --rm builder /app/build/pvd_tool \
/app/examples/pvd_tool/equipment.yaml \
/app/data/control_state.yaml \
5000 \
9090
# In another shell, drive it with the conformance harness or a real host.
docker compose run --rm builder /app/build/secs_conformance \
--host 127.0.0.1 --port 5000 --device 0
# 47 / 47 checks passed
```
Or via Docker Compose if you'd rather wire it as a service.
## What the host sees
Once a host connects and SELECTs:
1. **S1F1 → S1F2** returns `MDLN="ACME-PVD-3000"`, `SOFTREV="1.4.2"`.
2. **S1F3** on the 32 SVIDs returns live sensor readings — chamber
pressure tracks the simulator's target (default 1e-7 Torr in
idle), wafer counter increments per processed PJ, EPT state
gauge says `Standby`.
3. **S2F33/F35/F37** binds dynamic event reports; CEIDs 300 / 301 /
310 / 311 fire on real PJ activity.
4. **S2F41 RCMD=START** kicks the recipe runner: any PJ in
WaitingForStart transitions to Processing and the simulator
starts tracking the recipe's step targets. Sensor values change
in real time. CEID 300 (ProcessStarted) emits, then per-step
CEID 310/311, then CEID 301 (ProcessCompleted) on completion.
5. **S2F41 RCMD=FAULT** sets alarm 4 → S5F1 emitted (if enabled
via S5F3 first).
6. **S7F19** lists the 3 recipes; **S7F5** returns the body
(multi-line STEP definitions).
7. **S16F11** (PJ create) + **S14F9** (CJ create) + **S16F27**
(CJSTART) drives the full E40/E94 lifecycle.
## What's the same as the secs-gem demo server
`apps/secs_server.cpp` (used by `docker compose up server`) is the
canonical fully-loaded server. This example is structurally a
slimmer fork:
- Same Router pattern (`gem::Router` + `router.on(s, f, [...])`)
- Same event/alarm emission helpers (`deliver_or_spool`,
`emit_event`, `emit_alarm_set`)
- Same control-state-change handler wiring
What this example adds that the demo doesn't:
- **Sensor simulator** with multi-cadence poll loops. The demo's
SVID values stay at their YAML defaults; PVD's drift toward
recipe-step targets.
- **Recipe runner** that parses the recipe body and drives the PJ
FSM step-by-step. The demo's RCMD=START just emits the linked
CEID; PVD actually walks the recipe.
- **Alarm threshold monitor** — continuous evaluation of sensor
values against ECID setpoints. The demo only fires alarms when
RCMD=FAULT is sent.
- **EPT cycling** — automatic Standby↔Productive↔UnscheduledDowntime
based on PJ + alarm state. The demo doesn't cycle EPT.
- **Prometheus metrics exporter** on a second port. The demo logs
but doesn't export.
If you want one of these patterns in your own tool, lift the code
from `main.cpp` directly — each section is independently usable.
## What's not here
- **Persistence.** The demo server's `--spool-dir` flag is the
pattern to copy. Add `model->spool.enable_persistence(...)` etc.
at startup before binding the port. See INTEGRATION.md §5.
- **E84 handshake timers.** No load-port AMHS wiring; see
INTEGRATION.md §4.6 for the `E84AsioTimers` adapter.
- **Real I/O bridges.** Sensor values come from a random-walk
simulator. A real PVD tool would have a PLC/serial driver
module-bridge feeding `model->svids.set_value(...)` from real
hardware.
- **Production deployment hardening** — SECURITY.md (nftables,
stunnel, minisign signing) and INTEGRATION.md §7 (HA pattern).
## What you'd change for *your* tool
1. **Replace `equipment.yaml`** with your tool's actual SVIDs,
ECIDs, alarms, recipes. Run
`secs_server --validate-config` after every edit.
2. **Replace the sensor simulator** (`pvd::Simulator`) with calls
into your real hardware driver. Keep the `asio::post` pattern
for cross-thread updates.
3. **Replace the recipe runner** with your real recipe engine
integration. The shape — fire `Start`, walk steps, fire
`ProcessComplete` — is the contract; the implementation is
yours.
4. **Replace the alarm threshold monitor** with your real
alarm sources (sensor interrupts, watchdog timers, hardware
fault lines). Same `emit_alarm_set / emit_alarm_clear` API.
5. **Keep most of the Router handler section** — those are spec-
defined and you'll need them all in production.
That's it. No framework, no DI container, no abstract base
classes. ~700 lines of vendor code on top of the library.
## Cross-references
- [INTEGRATION.md](../../INTEGRATION.md) — the conceptual tutorial
this example concretizes
- [ARCHITECTURE.md](../../ARCHITECTURE.md) — how stores compose, how
to extend
- [BENCHMARKS.md](../../BENCHMARKS.md) — what the throughput
envelope looks like
- [SECURITY.md](../../SECURITY.md) — production hardening configs
- [apps/secs_server.cpp](../../apps/secs_server.cpp) — the demo
server's fully-loaded Router (every handler PVD inherits + a
few more)
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# ACME-PVD-3000 — example data dictionary for a fictional Physical
# Vapor Deposition tool. Designed to look like a real fab tool, not a
# unit-test fixture. Read this alongside main.cpp to see how each
# entry is wired to behaviour.
#
# Topology:
# - One process chamber, single-wafer
# - Four load ports, each accepting a 25-slot FOUP
# - Three deposition recipes (Al / Ti / Cu)
#
# Real PVD tools have hundreds of SVIDs. This one ships 30 — enough
# to demonstrate every wiring pattern (status, derived, setpoint,
# event, alarm, recipe, host command) without burying the example.
device:
id: 0
model_name: "ACME-PVD-3000"
software_rev: "1.4.2"
equipment_type: "PVD"
# E30 §6.10 — what the equipment self-reports to the host on S1F19.
# CCODE values follow E30 Appendix A.
capabilities:
- {code: 1, name: "Establish Communications"}
- {code: 2, name: "Dynamic Event Report Configuration"}
- {code: 3, name: "Variable Data Collection"}
- {code: 5, name: "Status Data Collection"}
- {code: 6, name: "Alarm Management"}
- {code: 7, name: "Remote Control"}
- {code: 8, name: "Equipment Constants"}
- {code: 9, name: "Process Program Management"}
- {code: 11, name: "Equipment Terminal Services"}
- {code: 12, name: "Clock"}
- {code: 14, name: "Spooling"}
- {code: 15, name: "Control (operator initiated)"}
- {code: 40, name: "E40 Process Job Management"}
- {code: 87, name: "E87 Carrier Management"}
- {code: 90, name: "E90 Substrate Tracking"}
- {code: 94, name: "E94 Control Job Management"}
- {code: 116, name: "E116 Equipment Performance Tracking"}
- {code: 148, name: "E148 Time Synchronization"}
- {code: 157, name: "E157 Module Process Tracking"}
# Status variables — read-only, host queries via S1F3.
# main.cpp updates the sensor values on a poll loop.
svids:
# Mandatory framework SVIDs
- {id: 1, name: ControlState, units: "", type: ASCII, value: ""}
- {id: 2, name: Clock, units: "", type: ASCII, value: ""}
- {id: 3, name: EventsEnabled, units: "", type: BOOLEAN, value: true}
# Equipment-defined
- {id: 10, name: ProcessChamberPressureTorr, units: "Torr", type: F4, value: 1.0e-7}
- {id: 11, name: ProcessChamberTemperatureC, units: "C", type: F4, value: 23.5}
- {id: 12, name: LoadlockPressureTorr, units: "Torr", type: F4, value: 760.0}
- {id: 13, name: VacuumPumpRpm, units: "rpm", type: U4, value: 0}
- {id: 20, name: SourcePowerWatts, units: "W", type: F4, value: 0.0}
- {id: 21, name: TargetVoltageVolts, units: "V", type: F4, value: 0.0}
- {id: 22, name: SubstrateBiasVolts, units: "V", type: F4, value: 0.0}
- {id: 23, name: SourceTargetMaterial, units: "", type: ASCII, value: "None"}
- {id: 30, name: ArgonFlowSccm, units: "sccm", type: F4, value: 0.0}
- {id: 31, name: NitrogenFlowSccm, units: "sccm", type: F4, value: 0.0}
- {id: 32, name: CoolingWaterFlowLpm, units: "L/min", type: F4, value: 12.5}
- {id: 40, name: ChuckTemperatureC, units: "C", type: F4, value: 24.0}
- {id: 41, name: ShieldTemperatureC, units: "C", type: F4, value: 24.0}
- {id: 50, name: WafersProcessedTotal, units: "wafer", type: U4, value: 0}
- {id: 51, name: WafersProcessedSinceCleanup, units: "wafer", type: U4, value: 0}
- {id: 52, name: ChamberHoursSinceCleanup, units: "h", type: F4, value: 0.0}
- {id: 53, name: ActiveRecipePpid, units: "", type: ASCII, value: ""}
- {id: 54, name: RecipeStepName, units: "", type: ASCII, value: ""}
- {id: 55, name: RecipeStepElapsedSec, units: "s", type: U4, value: 0}
- {id: 60, name: LoadPort1Active, units: "", type: BOOLEAN, value: false}
- {id: 61, name: LoadPort2Active, units: "", type: BOOLEAN, value: false}
- {id: 62, name: LoadPort3Active, units: "", type: BOOLEAN, value: false}
- {id: 63, name: LoadPort4Active, units: "", type: BOOLEAN, value: false}
- {id: 70, name: EptStateName, units: "", type: ASCII, value: "Standby"}
- {id: 71, name: ProductiveHoursTotal, units: "h", type: F4, value: 0.0}
- {id: 72, name: UnscheduledDowntimeHours, units: "h", type: F4, value: 0.0}
# Data variables — same shape as SVIDs but conceptually "intermediate
# data" rather than equipment status. Reported via S1F21/F22.
dvids:
- {id: 200, name: LastCycleTimeSec, units: "s", type: F4, value: 0.0}
- {id: 201, name: AverageCycleTimeSec, units: "s", type: F4, value: 0.0}
- {id: 202, name: BatchYieldPercent, units: "%", type: F4, value: 0.0}
- {id: 203, name: LastWaferProcessedId, units: "", type: ASCII, value: ""}
- {id: 204, name: ProcessChamberLeakRate, units: "Torr/s", type: F4, value: 1.0e-9}
# Equipment constants — host-settable parameters. S2F15 set, S2F13 read.
ecids:
- {id: 100, name: ChamberBasePressureSetpoint, units: "Torr", type: F4, value: 1.0e-7, min: "1.0e-9", max: "1.0e-5"}
- {id: 101, name: ChamberTempSetpointC, units: "C", type: F4, value: 25.0, min: "15.0", max: "40.0"}
- {id: 102, name: SourcePowerSetpointW, units: "W", type: F4, value: 1500.0, min: "0.0", max: "5000.0"}
- {id: 103, name: T_CRA_Seconds, units: "s", type: U4, value: 30, min: "5", max: "120"}
- {id: 104, name: T_DELAY_Seconds, units: "s", type: U4, value: 10, min: "5", max: "60"}
- {id: 105, name: CleaningIntervalWafers, units: "wafer", type: U4, value: 500, min: "100", max: "2000"}
- {id: 106, name: MaxRecipeRetries, units: "", type: U4, value: 3, min: "0", max: "10"}
# Collection events. CEID → linked report binding happens at runtime
# via S2F33/F35/F37; the equipment fires S6F11 on transitions through
# main.cpp's event-emit hooks.
ceids:
# Control / lifecycle
- {id: 100, name: ControlStateChanged}
- {id: 200, name: AlarmSet}
- {id: 201, name: AlarmCleared}
# Process lifecycle
- {id: 300, name: ProcessStarted}
- {id: 301, name: ProcessCompleted}
- {id: 302, name: ProcessAborted}
- {id: 303, name: ProcessPaused}
- {id: 304, name: ProcessResumed}
- {id: 310, name: RecipeStepStarted}
- {id: 311, name: RecipeStepCompleted}
# Material movement
- {id: 400, name: ControlJobExecuting}
- {id: 401, name: ControlJobCompleted}
- {id: 410, name: CarrierLoaded}
- {id: 411, name: CarrierUnloaded}
- {id: 420, name: SubstrateAtSource}
- {id: 421, name: SubstrateInProcess}
- {id: 422, name: SubstrateProcessed}
# Equipment performance (E116)
- {id: 500, name: EptEnteredProductive}
- {id: 501, name: EptEnteredStandby}
- {id: 502, name: EptEnteredEngineering}
- {id: 503, name: EptEnteredUnscheduledDowntime}
# Alarms. Categories follow E5 §10.3 ALCD lower-7 bitmap:
# 0x01 PersonalSafety 0x02 EquipmentSafety 0x04 ParameterError
# 0x08 ParameterWarning 0x10 Irrecoverable 0x20 EquipmentStatus
# 0x40 Attention
alarms:
- {id: 1, text: "Chamber pressure high (above setpoint)", category: 0x04}
- {id: 2, text: "Chamber pressure low (below setpoint)", category: 0x04}
- {id: 3, text: "Chamber temperature out of range", category: 0x04}
- {id: 4, text: "Source power loss during process", category: 0x12} # safety + error
- {id: 5, text: "Cooling water flow loss", category: 0x02} # equip safety
- {id: 6, text: "Vacuum pump failure", category: 0x12}
- {id: 7, text: "Door open during process", category: 0x01} # personal safety
- {id: 8, text: "Target end-of-life", category: 0x40} # attention
- {id: 9, text: "Recipe step timeout", category: 0x08} # warning
- {id: 10, text: "Cleaning interval exceeded (500 wafers)", category: 0x40}
- {id: 11, text: "Load port 1 carrier mis-clocked", category: 0x20}
- {id: 12, text: "Substrate scanner unavailable", category: 0x20}
# Recipes. The body is a placeholder string in this example; real
# tools would store binary recipe bundles (E42 formatted PP) here.
# The recipe runner in main.cpp parses the body line-by-line.
recipes:
- id: "AL-METALLIZATION-V3"
body: |
STEP PUMPDOWN duration=120s target=1.0e-7
STEP HEAT-SUBSTRATE duration=60s target=300C
STEP SOURCE-PREHEAT duration=30s power=500W
STEP DEPOSIT-AL duration=180s power=2500W gas=Argon flow=50sccm
STEP COOL duration=120s target=25C
STEP VENT duration=60s target=760
END
- id: "TI-BARRIER-V2"
body: |
STEP PUMPDOWN duration=120s target=1.0e-7
STEP HEAT-SUBSTRATE duration=60s target=350C
STEP DEPOSIT-TI duration=90s power=1800W gas=Argon flow=40sccm
STEP COOL duration=120s target=25C
STEP VENT duration=60s target=760
END
- id: "CU-SEED-V1"
body: |
STEP PUMPDOWN duration=120s target=1.0e-7
STEP HEAT-SUBSTRATE duration=60s target=250C
STEP DEPOSIT-CU duration=240s power=3000W gas=Argon flow=60sccm
STEP COOL duration=120s target=25C
STEP VENT duration=60s target=760
END
# Host commands. `emit_ceid` fires the named CEID after dispatch;
# `set_alarm` sets an alarm. `force_spool` is the demo-only test hook.
host_commands:
- {name: START, ack: Accept, emit_ceid: 300}
- {name: STOP, ack: Accept, emit_ceid: 301}
- {name: PAUSE, ack: Accept, emit_ceid: 303}
- {name: RESUME, ack: Accept, emit_ceid: 304}
- {name: ABORT, ack: Accept, emit_ceid: 302}
- {name: CLEAN_CHAMBER, ack: Accept}
- {name: FAULT, ack: Accept, set_alarm: 4} # injected fault for demo
- {name: SPOOL_ON, ack: Accept, force_spool: true}
- {name: SPOOL_OFF, ack: Accept, force_spool: false}
# Spool (E30 §6.22) — when the host disconnects, queue these streams
# for later drain via S6F23.
spool:
max_size: 1000
spoolable_streams: [5, 6]
# Auto-fire CEID 100 on every control-state change.
emit_on_control_change: 100
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